Pulse-Driven MEMS NO<sub>2</sub> Sensors Based on Hierarchical In<sub>2</sub>O<sub>3</sub> Nanostructures for Sensitive and Ultra-Low Power Detection

Pulse-Driven MEMS NO<sub>2</sub> Sensors Based on Hierarchical In<sub>2</sub>O<sub>3</sub> Nanostructures for Sensitive and Ultra-Low Power Detection

As the mainstream type of gas sensors, metal oxide semiconductor (MOS) gas sensors have garnered widespread attention due to their high sensitivity, fast response time, broad detection spectrum, long lifetime, low cost, and simple structure. However, the high power consumption due to the high operat...

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Bibliographic Details
Main Authors: Haixia Mei, Fuyun Zhang, Tingting Zhou, Tong Zhang
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Sensors
Subjects:
MEMS
gas sensor
NO<sub>2</sub>
high sensitivity
ultra-low power consumption
Online Access:https://www.mdpi.com/1424-8220/24/22/7188
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