Improved Conductivity of Low‐Temperature‐Synthesized Graphene/Cu for CMOS Backend‐of‐Line Interconnect Applications

Improved Conductivity of Low‐Temperature‐Synthesized Graphene/Cu for CMOS Backend‐of‐Line Interconnect Applications

Abstract This study proposes a synthesis strategy of high‐quality graphene films on the copper foil at a temperature of 400 °C throughout the graphene growth process without employing high‐temperature annealing. Through continuous CO2 laser pretreatment of the copper foil, the surface smoothness imp...

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Bibliographic Details
Main Authors: Peng‐Chi Wang, Yi‐Hsiang Shih, Chih‐Yuan Tseng, Yu‐Jin Liu, Yao‐Hung Huang, Chrong‐Jung Lin, Ya‐Chin King, Wei‐Chen Tu
Format: Article
Language:English
Published: Wiley-VCH 2025-03-01
Series:Advanced Materials Interfaces
Subjects:
conductivity
copper
graphene
low‐temperature
Online Access:https://doi.org/10.1002/admi.202400622
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https://doi.org/10.1002/admi.202400622

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