Effect of Ion Magnetron Sputtering Method on Scanning Electron Microscopy (SEM)Images of Materials with Different Surface Properties
In order to investigate the effect of ion magnetron sputtering parameters on the scanning electron microscopy (SEM) images of nonconductive materials with different surface properties， the advantages and limitations of various ion magnetron sputtering conditions， including target material， sputterin...
Saved in:
| Main Author: | |
|---|---|
| Format: | Article |
| Language: | zho |
| Published: |
Editorial Department of Materials Protection
2024-12-01
|
| Series: | Cailiao Baohu |
| Subjects: | |
| Online Access: | http://www.mat-pro.com/fileup/1001-1560/PDF/20241212.pdf |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1841538447779561472 |
|---|---|
| author | ZHANG Jie, ZOU Junwen, LIU Xueguang, LI Xiaoying |
| author_facet | ZHANG Jie, ZOU Junwen, LIU Xueguang, LI Xiaoying |
| author_sort | ZHANG Jie, ZOU Junwen, LIU Xueguang, LI Xiaoying |
| collection | DOAJ |
| description | In order to investigate the effect of ion magnetron sputtering parameters on the scanning electron microscopy (SEM) images of nonconductive materials with different surface properties， the advantages and limitations of various ion magnetron sputtering conditions， including target material， sputtering time and sputtering cycles were studied， along with their applicable ranges.Results showed that the gold target exhibited good continuity with large grain nucleation of gold.Due to its high sputtering energy， it easily caused thermal loss on the sample surface， and the gold grains adhered to the surface.Therefore， gold targets were found to be suitable for low -magnification SEM imaging(<10 000) and materials with a certain surface hardness.In contrast， the platinum target showed poor continuity with small platinum grain nucleation and lower sputtering energy.It was more likely to embed into the sample surface， forming a morphological framework， making it suitable for high-magnification SEM imaging (>30 000) and most non-conductive materials.Using a method of fewer， multiple ion magnetron sputtering cycles， reducing the sputtering cycles appropriately not only weakened the effect of the gold film on the material’s morphology and structure but also helped conserve resources and protect the environment.This result provides experimental guidance for researchers to scientifically and accurately analyze SEM images of samples. |
| format | Article |
| id | doaj-art-9c69d8fa1197418d8cac5261a716b902 |
| institution | Kabale University |
| issn | 1001-1560 |
| language | zho |
| publishDate | 2024-12-01 |
| publisher | Editorial Department of Materials Protection |
| record_format | Article |
| series | Cailiao Baohu |
| spelling | doaj-art-9c69d8fa1197418d8cac5261a716b9022025-01-14T07:51:35ZzhoEditorial Department of Materials ProtectionCailiao Baohu1001-15602024-12-01571210711310.16577/j.issn.1001-1560.2024.0275Effect of Ion Magnetron Sputtering Method on Scanning Electron Microscopy (SEM)Images of Materials with Different Surface PropertiesZHANG Jie, ZOU Junwen, LIU Xueguang, LI Xiaoying0(School of Materials and Energy， Guangdong University of Technology， Guangzhou 510006， China)In order to investigate the effect of ion magnetron sputtering parameters on the scanning electron microscopy (SEM) images of nonconductive materials with different surface properties， the advantages and limitations of various ion magnetron sputtering conditions， including target material， sputtering time and sputtering cycles were studied， along with their applicable ranges.Results showed that the gold target exhibited good continuity with large grain nucleation of gold.Due to its high sputtering energy， it easily caused thermal loss on the sample surface， and the gold grains adhered to the surface.Therefore， gold targets were found to be suitable for low -magnification SEM imaging(<10 000) and materials with a certain surface hardness.In contrast， the platinum target showed poor continuity with small platinum grain nucleation and lower sputtering energy.It was more likely to embed into the sample surface， forming a morphological framework， making it suitable for high-magnification SEM imaging (>30 000) and most non-conductive materials.Using a method of fewer， multiple ion magnetron sputtering cycles， reducing the sputtering cycles appropriately not only weakened the effect of the gold film on the material’s morphology and structure but also helped conserve resources and protect the environment.This result provides experimental guidance for researchers to scientifically and accurately analyze SEM images of samples.http://www.mat-pro.com/fileup/1001-1560/PDF/20241212.pdfscanning electron microscope； ion beam magnetron sputtering； non-conductive materials； surface properties； image |
| spellingShingle | ZHANG Jie, ZOU Junwen, LIU Xueguang, LI Xiaoying Effect of Ion Magnetron Sputtering Method on Scanning Electron Microscopy (SEM)Images of Materials with Different Surface Properties Cailiao Baohu scanning electron microscope； ion beam magnetron sputtering； non-conductive materials； surface properties； image |
| title | Effect of Ion Magnetron Sputtering Method on Scanning Electron Microscopy (SEM)Images of Materials with Different Surface Properties |
| title_full | Effect of Ion Magnetron Sputtering Method on Scanning Electron Microscopy (SEM)Images of Materials with Different Surface Properties |
| title_fullStr | Effect of Ion Magnetron Sputtering Method on Scanning Electron Microscopy (SEM)Images of Materials with Different Surface Properties |
| title_full_unstemmed | Effect of Ion Magnetron Sputtering Method on Scanning Electron Microscopy (SEM)Images of Materials with Different Surface Properties |
| title_short | Effect of Ion Magnetron Sputtering Method on Scanning Electron Microscopy (SEM)Images of Materials with Different Surface Properties |
| title_sort | effect of ion magnetron sputtering method on scanning electron microscopy sem images of materials with different surface properties |
| topic | scanning electron microscope； ion beam magnetron sputtering； non-conductive materials； surface properties； image |
| url | http://www.mat-pro.com/fileup/1001-1560/PDF/20241212.pdf |
| work_keys_str_mv | AT zhangjiezoujunwenliuxueguanglixiaoying effectofionmagnetronsputteringmethodonscanningelectronmicroscopysemimagesofmaterialswithdifferentsurfaceproperties |