Studies of structural and optical properties of sputtered SiC thin films
The present study explored the deposition of amorphous silicon carbide (a-SiC) thin films on Si (100) and glass substrates using RF-magnetron sputtering. The sputtering power is changed from 100 to 250 W to study its influence on the characteristics of a-SiC thin films. Raman spectroscopy reveals th...
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Engineering Society for Corrosion, Belgrade, Serbia
2024-06-01
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| Series: | Zaštita Materijala |
| Online Access: | https://www.zastita-materijala.org/index.php/home/article/view/1143 |
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| author | Mukesh Kumar Mukesh Kumar |
| author_facet | Mukesh Kumar Mukesh Kumar |
| author_sort | Mukesh Kumar Mukesh Kumar |
| collection | DOAJ |
| description | The present study explored the deposition of amorphous silicon carbide (a-SiC) thin films on Si (100) and glass substrates using RF-magnetron sputtering. The sputtering power is changed from 100 to 250 W to study its influence on the characteristics of a-SiC thin films. Raman spectroscopy reveals the formation of a-SiC as well as carbon clusters. The film deposited at 100 W clearly shows the presence of both transverse optical (TO) and longitudinal optical (LO) phonon modes. The average roughness of the a-SiC films found to follow an increasing trend with increase in the sputtering power. The optical band gap of the a-SiC films measured by UV-Visible spectrophotometer was found to increase up to 2.45 eV with decrease in sputtering power. All a-SiC thin films were highly transparent. The Photoluminescence (PL) spectroscopy results were in agreement with the data observed by UV-Visible spectroscopy |
| format | Article |
| id | doaj-art-974fc3df8b6d471db9715c5ff0e22e1b |
| institution | Kabale University |
| issn | 0351-9465 2466-2585 |
| language | English |
| publishDate | 2024-06-01 |
| publisher | Engineering Society for Corrosion, Belgrade, Serbia |
| record_format | Article |
| series | Zaštita Materijala |
| spelling | doaj-art-974fc3df8b6d471db9715c5ff0e22e1b2024-12-09T17:03:30ZengEngineering Society for Corrosion, Belgrade, SerbiaZaštita Materijala0351-94652466-25852024-06-0165234334910.62638/ZasMat11431142Studies of structural and optical properties of sputtered SiC thin filmsMukesh Kumar Mukesh Kumar0Department of Physics, Multanimal Modi College Modinagar, Ghaziabad, UP 201204, IndiaThe present study explored the deposition of amorphous silicon carbide (a-SiC) thin films on Si (100) and glass substrates using RF-magnetron sputtering. The sputtering power is changed from 100 to 250 W to study its influence on the characteristics of a-SiC thin films. Raman spectroscopy reveals the formation of a-SiC as well as carbon clusters. The film deposited at 100 W clearly shows the presence of both transverse optical (TO) and longitudinal optical (LO) phonon modes. The average roughness of the a-SiC films found to follow an increasing trend with increase in the sputtering power. The optical band gap of the a-SiC films measured by UV-Visible spectrophotometer was found to increase up to 2.45 eV with decrease in sputtering power. All a-SiC thin films were highly transparent. The Photoluminescence (PL) spectroscopy results were in agreement with the data observed by UV-Visible spectroscopyhttps://www.zastita-materijala.org/index.php/home/article/view/1143 |
| spellingShingle | Mukesh Kumar Mukesh Kumar Studies of structural and optical properties of sputtered SiC thin films Zaštita Materijala |
| title | Studies of structural and optical properties of sputtered SiC thin films |
| title_full | Studies of structural and optical properties of sputtered SiC thin films |
| title_fullStr | Studies of structural and optical properties of sputtered SiC thin films |
| title_full_unstemmed | Studies of structural and optical properties of sputtered SiC thin films |
| title_short | Studies of structural and optical properties of sputtered SiC thin films |
| title_sort | studies of structural and optical properties of sputtered sic thin films |
| url | https://www.zastita-materijala.org/index.php/home/article/view/1143 |
| work_keys_str_mv | AT mukeshkumarmukeshkumar studiesofstructuralandopticalpropertiesofsputteredsicthinfilms |