Micro Coriolis Mass Flow Sensor with Large Channel Diameter Realized by HNA Wet Etching
This paper introduces a Coriolis mass flow and density sensor. The sensor is made using Surface Channel Technology (SCT) but with selective wet etching to create the channels. This method forms suspended microfluidic channels with a larger cross-sectional area. Because of this larger cross-sectional...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-12-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/24/24/7952 |
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