A micro-patterned transient UV photodetector enabled by solvent-free microfabrication

Abstract Transient electronics, which can be controllably broken down with zero environmental impact, hold significant potential in implantable devices, hardware security, and disposable sensors. While miniaturization is essential for enhancing device performance, increasing integration density, and...

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Main Authors: Zhiqing Xu, Qinhua Guo, Lizhou Yang, Jiajun Zhang, Xiwen Liu, Qinghao He, Man Chan, Yunda Wang
Format: Article
Language:English
Published: Nature Publishing Group 2025-08-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-025-01012-3
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author Zhiqing Xu
Qinhua Guo
Lizhou Yang
Jiajun Zhang
Xiwen Liu
Qinghao He
Man Chan
Yunda Wang
author_facet Zhiqing Xu
Qinhua Guo
Lizhou Yang
Jiajun Zhang
Xiwen Liu
Qinghao He
Man Chan
Yunda Wang
author_sort Zhiqing Xu
collection DOAJ
description Abstract Transient electronics, which can be controllably broken down with zero environmental impact, hold significant potential in implantable devices, hardware security, and disposable sensors. While miniaturization is essential for enhancing device performance, increasing integration density, and enabling new applications, degradable materials often face challenges with conventional microfabrication processes like lithography due to their sensitivity to heat and solvents. In this paper, we present a UV photodetector (PD) with micro-scale patterning, fabricated using a novel solvent-free material patterning method. The PD, consisting of molybdenum (Mo) as the electrode, zinc oxide (ZnO) as the photoactive material, and polyvinyl alcohol (PVA) as the substrate, can be dissolved in deionized (DI) water, leaving behind non-toxic byproducts. The device exhibits high responsivity over 50 A/W and an obvious response to varying sunlight intensities, demonstrating its potential for temporary, eco-friendly UV sensing applications. Additionally, we demonstrated that the photoresist used in the solvent-free material patterning method can be reused for subsequent fabrication while maintaining good registration, enhancing efficiency and reducing material waste. This approach provides a scalable and high-efficiency microfabrication strategy for integrating functional materials into unconventional platforms, offering broader applicability in next-generation transient, biodegradable, and flexible sensor technologies.
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id doaj-art-92c1b6916f8f4749a4d61bc3b29cf2e1
institution Kabale University
issn 2055-7434
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publishDate 2025-08-01
publisher Nature Publishing Group
record_format Article
series Microsystems & Nanoengineering
spelling doaj-art-92c1b6916f8f4749a4d61bc3b29cf2e12025-08-24T11:34:59ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342025-08-0111111110.1038/s41378-025-01012-3A micro-patterned transient UV photodetector enabled by solvent-free microfabricationZhiqing Xu0Qinhua Guo1Lizhou Yang2Jiajun Zhang3Xiwen Liu4Qinghao He5Man Chan6Yunda Wang7The Hong Kong University of Science and Technology (Guangzhou)The Hong Kong University of Science and Technology (Guangzhou)The Hong Kong University of Science and Technology (Guangzhou)The Hong Kong University of Science and Technology (Guangzhou)The Hong Kong University of Science and Technology (Guangzhou)The Hong Kong University of Science and Technology (Guangzhou)The Hong Kong University of Science and Technology (Guangzhou)The Hong Kong University of Science and Technology (Guangzhou)Abstract Transient electronics, which can be controllably broken down with zero environmental impact, hold significant potential in implantable devices, hardware security, and disposable sensors. While miniaturization is essential for enhancing device performance, increasing integration density, and enabling new applications, degradable materials often face challenges with conventional microfabrication processes like lithography due to their sensitivity to heat and solvents. In this paper, we present a UV photodetector (PD) with micro-scale patterning, fabricated using a novel solvent-free material patterning method. The PD, consisting of molybdenum (Mo) as the electrode, zinc oxide (ZnO) as the photoactive material, and polyvinyl alcohol (PVA) as the substrate, can be dissolved in deionized (DI) water, leaving behind non-toxic byproducts. The device exhibits high responsivity over 50 A/W and an obvious response to varying sunlight intensities, demonstrating its potential for temporary, eco-friendly UV sensing applications. Additionally, we demonstrated that the photoresist used in the solvent-free material patterning method can be reused for subsequent fabrication while maintaining good registration, enhancing efficiency and reducing material waste. This approach provides a scalable and high-efficiency microfabrication strategy for integrating functional materials into unconventional platforms, offering broader applicability in next-generation transient, biodegradable, and flexible sensor technologies.https://doi.org/10.1038/s41378-025-01012-3
spellingShingle Zhiqing Xu
Qinhua Guo
Lizhou Yang
Jiajun Zhang
Xiwen Liu
Qinghao He
Man Chan
Yunda Wang
A micro-patterned transient UV photodetector enabled by solvent-free microfabrication
Microsystems & Nanoengineering
title A micro-patterned transient UV photodetector enabled by solvent-free microfabrication
title_full A micro-patterned transient UV photodetector enabled by solvent-free microfabrication
title_fullStr A micro-patterned transient UV photodetector enabled by solvent-free microfabrication
title_full_unstemmed A micro-patterned transient UV photodetector enabled by solvent-free microfabrication
title_short A micro-patterned transient UV photodetector enabled by solvent-free microfabrication
title_sort micro patterned transient uv photodetector enabled by solvent free microfabrication
url https://doi.org/10.1038/s41378-025-01012-3
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