APA (7th ed.) Citation

Erofeev, I., Hartanto, A. W., Khan, M. M., Deng, K., Kumar, K., Aabdin, Z., . . . Mirsaidov, U. Digital Etching of Molybdenum Interconnects Using Plasma Oxidation. Wiley-VCH.

Chicago Style (17th ed.) Citation

Erofeev, Ivan, et al. Digital Etching of Molybdenum Interconnects Using Plasma Oxidation. Wiley-VCH.

MLA (9th ed.) Citation

Erofeev, Ivan, et al. Digital Etching of Molybdenum Interconnects Using Plasma Oxidation. Wiley-VCH.

Warning: These citations may not always be 100% accurate.