Optimization and performance study of large aspect ratio SiC microgrooves by waterjet assisted laser machining

Optimization and performance study of large aspect ratio SiC microgrooves by waterjet assisted laser machining

Abstract Silicon carbide (SiC) ceramics hold significant application value in high-end fields such as semiconductors and aerospace due to their exceptional mechanical properties and thermal stability. Large-aspect-ratio (LAR) microgrooves in ceramics are crucial for enabling advanced functionalities...

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Bibliographic Details
Main Authors: Qijian Zhang, Wenzhao Yang, Xinwei Zhang, Jinjin Han, Yunxia Guo, Weining Lei
Format: Article
Language:English
Published: Nature Portfolio 2025-08-01
Series:Scientific Reports
Subjects:
Waterjet-assisted laser micromachining
Large-aspect-ratio microgrooves
Silicon carbide ceramics
Multi-objective optimization
Grey-relational analysis
Online Access:https://doi.org/10.1038/s41598-025-14499-7
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https://doi.org/10.1038/s41598-025-14499-7

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