Experimental characterization at nanoscale of single crystal silicon fracture toughness

The work reviews some preliminary recent micromechanical tests aimed at the evaluation of the fracture toughness of silicon. Pre-cracked nano specimens and alternatively notched nano specimens combined with the theory of critical distances (TCD) are compared. The results show that the fracture tough...

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Main Authors: Pasquale Gallo, Takashi Sumigawa, Takayuki Kitamura
Format: Article
Language:English
Published: Gruppo Italiano Frattura 2019-01-01
Series:Fracture and Structural Integrity
Subjects:
Online Access:http://www.gruppofrattura.it/pdf/rivista/numero47/numero_47_art_31.pdf
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author Pasquale Gallo
Takashi Sumigawa
Takayuki Kitamura
author_facet Pasquale Gallo
Takashi Sumigawa
Takayuki Kitamura
author_sort Pasquale Gallo
collection DOAJ
description The work reviews some preliminary recent micromechanical tests aimed at the evaluation of the fracture toughness of silicon. Pre-cracked nano specimens and alternatively notched nano specimens combined with the theory of critical distances (TCD) are compared. The results show that the fracture toughness of silicon is approximately 1 MPam0.5, regardless of the procedure involved (i.e., pre-cracked samples or TCD). This value agrees with macro counterpart, i.e., 0.75-1.08 MPa෷m0.5, and therefore the KIC is independent of the size and crystal orientation. However, by employing the TCD, the accurate control of the final crack tip which is currently very challenging, is overcome by using notched specimens. Additionally, the results give information about the crack propagation at the nanoscale. It seems that although the specimen axis deviates from the (011), the crack propagates along the cleavage plane (011) and the process develops very fast by breaking covalent bond at the crack tip. A brief discussion on beyond the breakdown of continuum theory and challenges toward nanometer scale fracture mechanics concludes the paper
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spelling doaj-art-8c65a4fa14bb490d84859e8932781c652025-01-02T23:00:55ZengGruppo Italiano FratturaFracture and Structural Integrity1971-89932019-01-01134740841510.3221/IGF-ESIS.47.3110.3221/IGF-ESIS.47.31Experimental characterization at nanoscale of single crystal silicon fracture toughnessPasquale GalloTakashi SumigawaTakayuki KitamuraThe work reviews some preliminary recent micromechanical tests aimed at the evaluation of the fracture toughness of silicon. Pre-cracked nano specimens and alternatively notched nano specimens combined with the theory of critical distances (TCD) are compared. The results show that the fracture toughness of silicon is approximately 1 MPam0.5, regardless of the procedure involved (i.e., pre-cracked samples or TCD). This value agrees with macro counterpart, i.e., 0.75-1.08 MPa෷m0.5, and therefore the KIC is independent of the size and crystal orientation. However, by employing the TCD, the accurate control of the final crack tip which is currently very challenging, is overcome by using notched specimens. Additionally, the results give information about the crack propagation at the nanoscale. It seems that although the specimen axis deviates from the (011), the crack propagates along the cleavage plane (011) and the process develops very fast by breaking covalent bond at the crack tip. A brief discussion on beyond the breakdown of continuum theory and challenges toward nanometer scale fracture mechanics concludes the paperhttp://www.gruppofrattura.it/pdf/rivista/numero47/numero_47_art_31.pdfFracture nanomechanics Silicon Nanoscale Fracture toughness
spellingShingle Pasquale Gallo
Takashi Sumigawa
Takayuki Kitamura
Experimental characterization at nanoscale of single crystal silicon fracture toughness
Fracture and Structural Integrity
Fracture nanomechanics
Silicon
Nanoscale
Fracture toughness
title Experimental characterization at nanoscale of single crystal silicon fracture toughness
title_full Experimental characterization at nanoscale of single crystal silicon fracture toughness
title_fullStr Experimental characterization at nanoscale of single crystal silicon fracture toughness
title_full_unstemmed Experimental characterization at nanoscale of single crystal silicon fracture toughness
title_short Experimental characterization at nanoscale of single crystal silicon fracture toughness
title_sort experimental characterization at nanoscale of single crystal silicon fracture toughness
topic Fracture nanomechanics
Silicon
Nanoscale
Fracture toughness
url http://www.gruppofrattura.it/pdf/rivista/numero47/numero_47_art_31.pdf
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AT takashisumigawa experimentalcharacterizationatnanoscaleofsinglecrystalsiliconfracturetoughness
AT takayukikitamura experimentalcharacterizationatnanoscaleofsinglecrystalsiliconfracturetoughness