Chip-scale sensor for spectroscopic metrology
Abstract Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observati...
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| Format: | Article |
| Language: | English |
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Nature Portfolio
2024-11-01
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| Series: | Nature Communications |
| Online Access: | https://doi.org/10.1038/s41467-024-54708-x |
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| _version_ | 1846147601577017344 |
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| author | Chunhui Yao Wanlu Zhang Peng Bao Jie Ma Wei Zhuo Minjia Chen Zhitian Shi Jingwen Zhou Yuxiao Ye Liang Ming Ting Yan Richard Penty Qixiang Cheng |
| author_facet | Chunhui Yao Wanlu Zhang Peng Bao Jie Ma Wei Zhuo Minjia Chen Zhitian Shi Jingwen Zhou Yuxiao Ye Liang Ming Ting Yan Richard Penty Qixiang Cheng |
| author_sort | Chunhui Yao |
| collection | DOAJ |
| description | Abstract Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observation window. The prevailing view in the community holds that miniaturized spectrometers are most suitable for coarse identification of signature peaks. Here, we present an integrated reconstructive spectrometer that enables near-infrared (NIR) spectroscopic metrology, and demonstrate a fully packaged sensor with auxiliary electronics. Such a sensor operates over a 520 nm bandwidth together with a resolution below 8 pm, yielding a record-breaking bandwidth-to-resolution ratio of over 65,000. The classification of different types of solid substances and the concentration measurement of aqueous and organic solutions are performed, all achieving approximately 100% accuracy. Notably, the detection limit of our sensor matches that of commercial benchtop counterparts, which is as low as 0.1% (i.e. 100 mg/dL) for identifying the concentration of glucose solution. |
| format | Article |
| id | doaj-art-8b35174dbaad4f5cbc62c7cd43a4abdc |
| institution | Kabale University |
| issn | 2041-1723 |
| language | English |
| publishDate | 2024-11-01 |
| publisher | Nature Portfolio |
| record_format | Article |
| series | Nature Communications |
| spelling | doaj-art-8b35174dbaad4f5cbc62c7cd43a4abdc2024-12-01T12:35:58ZengNature PortfolioNature Communications2041-17232024-11-0115111110.1038/s41467-024-54708-xChip-scale sensor for spectroscopic metrologyChunhui Yao0Wanlu Zhang1Peng Bao2Jie Ma3Wei Zhuo4Minjia Chen5Zhitian Shi6Jingwen Zhou7Yuxiao Ye8Liang Ming9Ting Yan10Richard Penty11Qixiang Cheng12Electrical Engineering Division, Department of Engineering, University of CambridgeElectrical Engineering Division, Department of Engineering, University of CambridgeElectrical Engineering Division, Department of Engineering, University of CambridgeGlitterinTech LimitedGlitterinTech LimitedElectrical Engineering Division, Department of Engineering, University of CambridgeElectrical Engineering Division, Department of Engineering, University of CambridgeGlitterinTech LimitedGlitterinTech LimitedGlitterinTech LimitedGlitterinTech LimitedElectrical Engineering Division, Department of Engineering, University of CambridgeElectrical Engineering Division, Department of Engineering, University of CambridgeAbstract Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observation window. The prevailing view in the community holds that miniaturized spectrometers are most suitable for coarse identification of signature peaks. Here, we present an integrated reconstructive spectrometer that enables near-infrared (NIR) spectroscopic metrology, and demonstrate a fully packaged sensor with auxiliary electronics. Such a sensor operates over a 520 nm bandwidth together with a resolution below 8 pm, yielding a record-breaking bandwidth-to-resolution ratio of over 65,000. The classification of different types of solid substances and the concentration measurement of aqueous and organic solutions are performed, all achieving approximately 100% accuracy. Notably, the detection limit of our sensor matches that of commercial benchtop counterparts, which is as low as 0.1% (i.e. 100 mg/dL) for identifying the concentration of glucose solution.https://doi.org/10.1038/s41467-024-54708-x |
| spellingShingle | Chunhui Yao Wanlu Zhang Peng Bao Jie Ma Wei Zhuo Minjia Chen Zhitian Shi Jingwen Zhou Yuxiao Ye Liang Ming Ting Yan Richard Penty Qixiang Cheng Chip-scale sensor for spectroscopic metrology Nature Communications |
| title | Chip-scale sensor for spectroscopic metrology |
| title_full | Chip-scale sensor for spectroscopic metrology |
| title_fullStr | Chip-scale sensor for spectroscopic metrology |
| title_full_unstemmed | Chip-scale sensor for spectroscopic metrology |
| title_short | Chip-scale sensor for spectroscopic metrology |
| title_sort | chip scale sensor for spectroscopic metrology |
| url | https://doi.org/10.1038/s41467-024-54708-x |
| work_keys_str_mv | AT chunhuiyao chipscalesensorforspectroscopicmetrology AT wanluzhang chipscalesensorforspectroscopicmetrology AT pengbao chipscalesensorforspectroscopicmetrology AT jiema chipscalesensorforspectroscopicmetrology AT weizhuo chipscalesensorforspectroscopicmetrology AT minjiachen chipscalesensorforspectroscopicmetrology AT zhitianshi chipscalesensorforspectroscopicmetrology AT jingwenzhou chipscalesensorforspectroscopicmetrology AT yuxiaoye chipscalesensorforspectroscopicmetrology AT liangming chipscalesensorforspectroscopicmetrology AT tingyan chipscalesensorforspectroscopicmetrology AT richardpenty chipscalesensorforspectroscopicmetrology AT qixiangcheng chipscalesensorforspectroscopicmetrology |