Chip-scale sensor for spectroscopic metrology

Abstract Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observati...

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Main Authors: Chunhui Yao, Wanlu Zhang, Peng Bao, Jie Ma, Wei Zhuo, Minjia Chen, Zhitian Shi, Jingwen Zhou, Yuxiao Ye, Liang Ming, Ting Yan, Richard Penty, Qixiang Cheng
Format: Article
Language:English
Published: Nature Portfolio 2024-11-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-024-54708-x
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author Chunhui Yao
Wanlu Zhang
Peng Bao
Jie Ma
Wei Zhuo
Minjia Chen
Zhitian Shi
Jingwen Zhou
Yuxiao Ye
Liang Ming
Ting Yan
Richard Penty
Qixiang Cheng
author_facet Chunhui Yao
Wanlu Zhang
Peng Bao
Jie Ma
Wei Zhuo
Minjia Chen
Zhitian Shi
Jingwen Zhou
Yuxiao Ye
Liang Ming
Ting Yan
Richard Penty
Qixiang Cheng
author_sort Chunhui Yao
collection DOAJ
description Abstract Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observation window. The prevailing view in the community holds that miniaturized spectrometers are most suitable for coarse identification of signature peaks. Here, we present an integrated reconstructive spectrometer that enables near-infrared (NIR) spectroscopic metrology, and demonstrate a fully packaged sensor with auxiliary electronics. Such a sensor operates over a 520 nm bandwidth together with a resolution below 8 pm, yielding a record-breaking bandwidth-to-resolution ratio of over 65,000. The classification of different types of solid substances and the concentration measurement of aqueous and organic solutions are performed, all achieving approximately 100% accuracy. Notably, the detection limit of our sensor matches that of commercial benchtop counterparts, which is as low as 0.1% (i.e. 100 mg/dL) for identifying the concentration of glucose solution.
format Article
id doaj-art-8b35174dbaad4f5cbc62c7cd43a4abdc
institution Kabale University
issn 2041-1723
language English
publishDate 2024-11-01
publisher Nature Portfolio
record_format Article
series Nature Communications
spelling doaj-art-8b35174dbaad4f5cbc62c7cd43a4abdc2024-12-01T12:35:58ZengNature PortfolioNature Communications2041-17232024-11-0115111110.1038/s41467-024-54708-xChip-scale sensor for spectroscopic metrologyChunhui Yao0Wanlu Zhang1Peng Bao2Jie Ma3Wei Zhuo4Minjia Chen5Zhitian Shi6Jingwen Zhou7Yuxiao Ye8Liang Ming9Ting Yan10Richard Penty11Qixiang Cheng12Electrical Engineering Division, Department of Engineering, University of CambridgeElectrical Engineering Division, Department of Engineering, University of CambridgeElectrical Engineering Division, Department of Engineering, University of CambridgeGlitterinTech LimitedGlitterinTech LimitedElectrical Engineering Division, Department of Engineering, University of CambridgeElectrical Engineering Division, Department of Engineering, University of CambridgeGlitterinTech LimitedGlitterinTech LimitedGlitterinTech LimitedGlitterinTech LimitedElectrical Engineering Division, Department of Engineering, University of CambridgeElectrical Engineering Division, Department of Engineering, University of CambridgeAbstract Miniaturized spectrometers hold great promise for in situ, in vitro, and even in vivo sensing applications. However, their size reduction imposes vital performance constraints in meeting the rigorous demands of spectroscopy, including fine resolution, high accuracy, and ultra-wide observation window. The prevailing view in the community holds that miniaturized spectrometers are most suitable for coarse identification of signature peaks. Here, we present an integrated reconstructive spectrometer that enables near-infrared (NIR) spectroscopic metrology, and demonstrate a fully packaged sensor with auxiliary electronics. Such a sensor operates over a 520 nm bandwidth together with a resolution below 8 pm, yielding a record-breaking bandwidth-to-resolution ratio of over 65,000. The classification of different types of solid substances and the concentration measurement of aqueous and organic solutions are performed, all achieving approximately 100% accuracy. Notably, the detection limit of our sensor matches that of commercial benchtop counterparts, which is as low as 0.1% (i.e. 100 mg/dL) for identifying the concentration of glucose solution.https://doi.org/10.1038/s41467-024-54708-x
spellingShingle Chunhui Yao
Wanlu Zhang
Peng Bao
Jie Ma
Wei Zhuo
Minjia Chen
Zhitian Shi
Jingwen Zhou
Yuxiao Ye
Liang Ming
Ting Yan
Richard Penty
Qixiang Cheng
Chip-scale sensor for spectroscopic metrology
Nature Communications
title Chip-scale sensor for spectroscopic metrology
title_full Chip-scale sensor for spectroscopic metrology
title_fullStr Chip-scale sensor for spectroscopic metrology
title_full_unstemmed Chip-scale sensor for spectroscopic metrology
title_short Chip-scale sensor for spectroscopic metrology
title_sort chip scale sensor for spectroscopic metrology
url https://doi.org/10.1038/s41467-024-54708-x
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