Sacrifice-layer-free transfer of wafer-scale atomic-layer-deposited dielectrics and full-device stacks for two-dimensional electronics

Abstract Transfer printing techniques have enabled the fabrication of devices on soft or delicate substrates that are incompatible with conventional manufacturing processes. However, the involved sacrifice-layer removal process typically causes damage to the quality of device interfaces. Here, we de...

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Bibliographic Details
Main Authors: Yuyu He, Zunxian Lv, Zhaochao Liu, Mingjian Yang, Wei Ai, Jiabiao Chen, Wanying Chen, Bing Wang, Xuewen Fu, Feng Luo, Jinxiong Wu
Format: Article
Language:English
Published: Nature Portfolio 2025-07-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-025-60864-5
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