Nanofabrication of superhydrophobic fluidic concentrators coupled with metallic plasmonic nano-antennas for SERS analysis in the sub-femtomolar range

Nanofabrication of superhydrophobic fluidic concentrators coupled with metallic plasmonic nano-antennas for SERS analysis in the sub-femtomolar range

Self-assembled silicon nanopillars decorated with metallic nanoparticles have emerged as efficient Surface Enhanced Raman Spectroscopy (SERS) substrates. In this study, we combine black Silicon Reactive Ion Etching-Inductively Coupled Plasma (RIE-ICP) and thin film deposition of Silver (Ag) to produ...

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Bibliographic Details
Main Authors: Sofien Ramos, Victor Fabre, Mathieu Arribat, Aurélie Lecestre, Adrian Laborde, Frank Carcenac, Philippe Louarn, Emmanuelle Trevisiol, Christophe Vieu
Format: Article
Language:English
Published: Elsevier 2025-09-01
Series:Micro and Nano Engineering
Subjects:
Surface Enhanced Raman Spectroscopy (SERS)
Superhydrophobic surfaces
Black silicon
Online Access:http://www.sciencedirect.com/science/article/pii/S2590007225000206
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