Biomimetic Contact Behavior Inspired Tactile Sensing Array with Programmable Microdomes Pattern by Scalable and Consistent Fabrication
Abstract Flexible sensor arrays have attracted extensive attention in human‐computer interaction. However, realizing high‐performance sensor units with programmable properties, and expanding them to multi‐pixel flexible arrays to maintain high sensing consistency is still struggling. Inspired by the...
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Wiley
2024-11-01
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| Series: | Advanced Science |
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| Online Access: | https://doi.org/10.1002/advs.202408082 |
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| author | Xiaoliang Chen Yizhuo Luo Yun Chen Sheng Li Shizheng Deng Bin Wang Qi Zhang Xiangmeng Li Xiangming Li Chunhui Wang Juan He Hongmiao Tian Jinyou Shao |
| author_facet | Xiaoliang Chen Yizhuo Luo Yun Chen Sheng Li Shizheng Deng Bin Wang Qi Zhang Xiangmeng Li Xiangming Li Chunhui Wang Juan He Hongmiao Tian Jinyou Shao |
| author_sort | Xiaoliang Chen |
| collection | DOAJ |
| description | Abstract Flexible sensor arrays have attracted extensive attention in human‐computer interaction. However, realizing high‐performance sensor units with programmable properties, and expanding them to multi‐pixel flexible arrays to maintain high sensing consistency is still struggling. Inspired by the contact behavior of octopus antenna, this paper proposes a programmable multistage dome structure‐based flexible sensing array with robust sensing stability and high array consistency. The biomimetic multistage dome structure is pressurized to gradually contact the electrode to achieve high sensitivity and a large pressure range. By adjusting the arrangement of the multistage dome structure, the pressure range and sensitivity can be customized. More importantly, this biomimetic structure can be expanded to a multi‐pixel sensor array at the wafer level with high consistency through scalable and high‐precision imprinting technologies. In the imprinting process, the conductive layer is conformally embedded into the multistage dome structure to improve the stability (maintain stability over 22 000 cycles). In addition, the braced isolation structure is designed to effectively improve the anti‐crosstalk performance of the sensor array (crosstalk coefficient: 26.62 dB). Benefitting from the programmable structural design and high‐precision manufacturing process, the sensor array can be customized and is demonstrated to detect human musculation in medical rehabilitation applications. |
| format | Article |
| id | doaj-art-803873483448438c936d4feda8ea049e |
| institution | Kabale University |
| issn | 2198-3844 |
| language | English |
| publishDate | 2024-11-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advanced Science |
| spelling | doaj-art-803873483448438c936d4feda8ea049e2024-11-20T19:25:40ZengWileyAdvanced Science2198-38442024-11-011143n/an/a10.1002/advs.202408082Biomimetic Contact Behavior Inspired Tactile Sensing Array with Programmable Microdomes Pattern by Scalable and Consistent FabricationXiaoliang Chen0Yizhuo Luo1Yun Chen2Sheng Li3Shizheng Deng4Bin Wang5Qi Zhang6Xiangmeng Li7Xiangming Li8Chunhui Wang9Juan He10Hongmiao Tian11Jinyou Shao12Micro‐ and Nano‐technology Research Center, State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 ChinaMicro‐ and Nano‐technology Research Center, State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 ChinaMicro‐ and Nano‐technology Research Center, State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 ChinaMicro‐ and Nano‐technology Research Center, State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 ChinaMicro‐ and Nano‐technology Research Center, State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 ChinaMicro‐ and Nano‐technology Research Center, State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 ChinaMicro‐ and Nano‐technology Research Center, State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 ChinaShanxi Provincial Key Laboratory for Advanced Manufacturing Technology North University of China Taiyuan Shanxi 030051 ChinaMicro‐ and Nano‐technology Research Center, State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 ChinaMicro‐ and Nano‐technology Research Center, State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 ChinaDepartment of Rehabilitation Medicine First Affiliated Hospital of Xi'an Jiaotong University Xi'an Shaanxi 710061 ChinaMicro‐ and Nano‐technology Research Center, State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 ChinaMicro‐ and Nano‐technology Research Center, State Key Laboratory for Manufacturing Systems Engineering Xi'an Jiaotong University Xi'an Shaanxi 710049 ChinaAbstract Flexible sensor arrays have attracted extensive attention in human‐computer interaction. However, realizing high‐performance sensor units with programmable properties, and expanding them to multi‐pixel flexible arrays to maintain high sensing consistency is still struggling. Inspired by the contact behavior of octopus antenna, this paper proposes a programmable multistage dome structure‐based flexible sensing array with robust sensing stability and high array consistency. The biomimetic multistage dome structure is pressurized to gradually contact the electrode to achieve high sensitivity and a large pressure range. By adjusting the arrangement of the multistage dome structure, the pressure range and sensitivity can be customized. More importantly, this biomimetic structure can be expanded to a multi‐pixel sensor array at the wafer level with high consistency through scalable and high‐precision imprinting technologies. In the imprinting process, the conductive layer is conformally embedded into the multistage dome structure to improve the stability (maintain stability over 22 000 cycles). In addition, the braced isolation structure is designed to effectively improve the anti‐crosstalk performance of the sensor array (crosstalk coefficient: 26.62 dB). Benefitting from the programmable structural design and high‐precision manufacturing process, the sensor array can be customized and is demonstrated to detect human musculation in medical rehabilitation applications.https://doi.org/10.1002/advs.202408082embeddedflexible sensing arraymultistage microstructureoctopus‐inspiredprogrammable |
| spellingShingle | Xiaoliang Chen Yizhuo Luo Yun Chen Sheng Li Shizheng Deng Bin Wang Qi Zhang Xiangmeng Li Xiangming Li Chunhui Wang Juan He Hongmiao Tian Jinyou Shao Biomimetic Contact Behavior Inspired Tactile Sensing Array with Programmable Microdomes Pattern by Scalable and Consistent Fabrication Advanced Science embedded flexible sensing array multistage microstructure octopus‐inspired programmable |
| title | Biomimetic Contact Behavior Inspired Tactile Sensing Array with Programmable Microdomes Pattern by Scalable and Consistent Fabrication |
| title_full | Biomimetic Contact Behavior Inspired Tactile Sensing Array with Programmable Microdomes Pattern by Scalable and Consistent Fabrication |
| title_fullStr | Biomimetic Contact Behavior Inspired Tactile Sensing Array with Programmable Microdomes Pattern by Scalable and Consistent Fabrication |
| title_full_unstemmed | Biomimetic Contact Behavior Inspired Tactile Sensing Array with Programmable Microdomes Pattern by Scalable and Consistent Fabrication |
| title_short | Biomimetic Contact Behavior Inspired Tactile Sensing Array with Programmable Microdomes Pattern by Scalable and Consistent Fabrication |
| title_sort | biomimetic contact behavior inspired tactile sensing array with programmable microdomes pattern by scalable and consistent fabrication |
| topic | embedded flexible sensing array multistage microstructure octopus‐inspired programmable |
| url | https://doi.org/10.1002/advs.202408082 |
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