Measuring. Monitoring. Management. Control
Background. The paper investigates the sensing element of a capacitive pressure sensor based on a silicon corrugated membrane. Materials and methods. Using finite element modeling, the parameters of the corrugation were determined, which make it possible to double the sensitivity compared to a fla...
Saved in:
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Penza State University Publishing House
2024-12-01
|
| Series: | Измерение, мониторинг, управление, контроль |
| Subjects: | |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|