Fabrication and Characterization of Physical Vapour Deposition Derived Amorphous Co₁₇Fe₅₄Ni₂₉ Thin Film for Magnetic Sensing Applications

The tri-metallic amorphous alloy Co17Fe54Ni29 is highly desirable for electronics and magnetic sensing applications, owing to its unique properties that stem from disordered atomic configurations. Due to the material’s intrinsic complexity, achieving uniform thin films and conducting comp...

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Main Authors: S. Vimala Gayathri, D. Subbulekshmi
Format: Article
Language:English
Published: IEEE 2025-01-01
Series:IEEE Access
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Online Access:https://ieeexplore.ieee.org/document/11121827/
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author S. Vimala Gayathri
D. Subbulekshmi
author_facet S. Vimala Gayathri
D. Subbulekshmi
author_sort S. Vimala Gayathri
collection DOAJ
description The tri-metallic amorphous alloy Co17Fe54Ni29 is highly desirable for electronics and magnetic sensing applications, owing to its unique properties that stem from disordered atomic configurations. Due to the material&#x2019;s intrinsic complexity, achieving uniform thin films and conducting comprehensive analyses has been challenging. The objective of this study is to gain a comprehensive understanding of Co17Fe54Ni29 by optimizing PVD deposition parameters and characterizing thin films sputtered onto glass substrates. Characterization techniques include FTIR and UV&#x2013;Vis spectroscopy (for chemical and optical analysis), profilometry (to assess surface features), XRD (to confirm the amorphous structure), XPS (to determine elemental composition and bonding states), and SEM (to analyse surface morphology and particle size). By varying RF power from 100W to 150W, enhanced chemical interaction between metal species and oxygen was observed, accompanied by an increase in particle size, film thickness, and surface roughness. Surface wettability also changed, with the film transitioning from hydrophilic to hydrophobic behavior as contact angles exceeded 90&#x00B0;. The films exhibited reduced absorbance and improved optical transmittance, indicating potential for optoelectronic applications. This study provides important insights into how sputtering parameters influence film structure and properties. VSM analysis revealed that the film deposited at 130 W exhibited the most favorable soft magnetic properties (M<inline-formula> <tex-math notation="LaTeX">${}_{\mathbf {s}} = 7.02$ </tex-math></inline-formula> emu/g, H<inline-formula> <tex-math notation="LaTeX">${}_{\mathbf {c}} = 9.75$ </tex-math></inline-formula> Oe), making it the optimal choice for magnetic sensor applications.
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spelling doaj-art-7ade1f35d9c04e4a806b44520f01abd52025-08-25T23:12:15ZengIEEEIEEE Access2169-35362025-01-011314296114297910.1109/ACCESS.2025.359735311121827Fabrication and Characterization of Physical Vapour Deposition Derived Amorphous Co&#x2081;&#x2087;Fe&#x2085;&#x2084;Ni&#x2082;&#x2089; Thin Film for Magnetic Sensing ApplicationsS. Vimala Gayathri0https://orcid.org/0009-0006-8227-7880D. Subbulekshmi1https://orcid.org/0000-0002-6172-5238School of Electrical Engineering, Vellore Institute of Technology, Chennai, IndiaSchool of Electrical Engineering, Vellore Institute of Technology, Chennai, IndiaThe tri-metallic amorphous alloy Co17Fe54Ni29 is highly desirable for electronics and magnetic sensing applications, owing to its unique properties that stem from disordered atomic configurations. Due to the material&#x2019;s intrinsic complexity, achieving uniform thin films and conducting comprehensive analyses has been challenging. The objective of this study is to gain a comprehensive understanding of Co17Fe54Ni29 by optimizing PVD deposition parameters and characterizing thin films sputtered onto glass substrates. Characterization techniques include FTIR and UV&#x2013;Vis spectroscopy (for chemical and optical analysis), profilometry (to assess surface features), XRD (to confirm the amorphous structure), XPS (to determine elemental composition and bonding states), and SEM (to analyse surface morphology and particle size). By varying RF power from 100W to 150W, enhanced chemical interaction between metal species and oxygen was observed, accompanied by an increase in particle size, film thickness, and surface roughness. Surface wettability also changed, with the film transitioning from hydrophilic to hydrophobic behavior as contact angles exceeded 90&#x00B0;. The films exhibited reduced absorbance and improved optical transmittance, indicating potential for optoelectronic applications. This study provides important insights into how sputtering parameters influence film structure and properties. VSM analysis revealed that the film deposited at 130 W exhibited the most favorable soft magnetic properties (M<inline-formula> <tex-math notation="LaTeX">${}_{\mathbf {s}} = 7.02$ </tex-math></inline-formula> emu/g, H<inline-formula> <tex-math notation="LaTeX">${}_{\mathbf {c}} = 9.75$ </tex-math></inline-formula> Oe), making it the optimal choice for magnetic sensor applications.https://ieeexplore.ieee.org/document/11121827/Amorphous alloyschemical propertiesmorphological analysisoptical propertiesmagnetic propertiesstructural analysis
spellingShingle S. Vimala Gayathri
D. Subbulekshmi
Fabrication and Characterization of Physical Vapour Deposition Derived Amorphous Co&#x2081;&#x2087;Fe&#x2085;&#x2084;Ni&#x2082;&#x2089; Thin Film for Magnetic Sensing Applications
IEEE Access
Amorphous alloys
chemical properties
morphological analysis
optical properties
magnetic properties
structural analysis
title Fabrication and Characterization of Physical Vapour Deposition Derived Amorphous Co&#x2081;&#x2087;Fe&#x2085;&#x2084;Ni&#x2082;&#x2089; Thin Film for Magnetic Sensing Applications
title_full Fabrication and Characterization of Physical Vapour Deposition Derived Amorphous Co&#x2081;&#x2087;Fe&#x2085;&#x2084;Ni&#x2082;&#x2089; Thin Film for Magnetic Sensing Applications
title_fullStr Fabrication and Characterization of Physical Vapour Deposition Derived Amorphous Co&#x2081;&#x2087;Fe&#x2085;&#x2084;Ni&#x2082;&#x2089; Thin Film for Magnetic Sensing Applications
title_full_unstemmed Fabrication and Characterization of Physical Vapour Deposition Derived Amorphous Co&#x2081;&#x2087;Fe&#x2085;&#x2084;Ni&#x2082;&#x2089; Thin Film for Magnetic Sensing Applications
title_short Fabrication and Characterization of Physical Vapour Deposition Derived Amorphous Co&#x2081;&#x2087;Fe&#x2085;&#x2084;Ni&#x2082;&#x2089; Thin Film for Magnetic Sensing Applications
title_sort fabrication and characterization of physical vapour deposition derived amorphous co x2081 x2087 fe x2085 x2084 ni x2082 x2089 thin film for magnetic sensing applications
topic Amorphous alloys
chemical properties
morphological analysis
optical properties
magnetic properties
structural analysis
url https://ieeexplore.ieee.org/document/11121827/
work_keys_str_mv AT svimalagayathri fabricationandcharacterizationofphysicalvapourdepositionderivedamorphouscox2081x2087fex2085x2084nix2082x2089thinfilmformagneticsensingapplications
AT dsubbulekshmi fabricationandcharacterizationofphysicalvapourdepositionderivedamorphouscox2081x2087fex2085x2084nix2082x2089thinfilmformagneticsensingapplications