Tilted Triangular Springs with Constant-Force Reaction
Guiding mechanisms are among the most elementary components of in-plane micro-electro-mechanical systems (MEMS). Usually, a spring is desired that is compliant in only one direction and stiff in other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers t...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-06-01
|
| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/97/1/222 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Summary: | Guiding mechanisms are among the most elementary components of in-plane micro-electro-mechanical systems (MEMS). Usually, a spring is desired that is compliant in only one direction and stiff in other directions. We introduce triangular springs with a preset tilting angle. The tilting angle lowers the force reaction in the displacement direction and implements a constant-force reaction whereby the maximum selectivity of the tilted triangular spring is shifted to larger displacements. Thus, the tilted triangular springs can increase the lateral stability of comb-drive actuators. We show tilted triangular springs exhibiting constant forces in a deflection range of about 75 µm to 175 µm. |
|---|---|
| ISSN: | 2504-3900 |