Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage
Highlights The fundamental principles and step-by-step procedures of photolithography are introduced, and a nuanced understanding of its operational mechanisms and the criteria for photoresist selection is offered. Various specific roles that photolithography plays in microbatteries (MBs) fabricatio...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2025-01-01
|
| Series: | Nano-Micro Letters |
| Subjects: | |
| Online Access: | https://doi.org/10.1007/s40820-024-01625-9 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1841544364123226112 |
|---|---|
| author | Yuan Ma Sen Wang Zhong-Shuai Wu |
| author_facet | Yuan Ma Sen Wang Zhong-Shuai Wu |
| author_sort | Yuan Ma |
| collection | DOAJ |
| description | Highlights The fundamental principles and step-by-step procedures of photolithography are introduced, and a nuanced understanding of its operational mechanisms and the criteria for photoresist selection is offered. Various specific roles that photolithography plays in microbatteries (MBs) fabrication, including templates for 2D and 3D micropatterns, MB active components, and the sacrificial layer for constructing micro-Swiss-roll structure, are elaborated. The challenges and future directions of MBs fabricated using photolithography, including materials selection, packaging techniques, application, and performance evaluation, are discussed. |
| format | Article |
| id | doaj-art-706d3359e3e043bea40b485f3ce7061a |
| institution | Kabale University |
| issn | 2311-6706 2150-5551 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | SpringerOpen |
| record_format | Article |
| series | Nano-Micro Letters |
| spelling | doaj-art-706d3359e3e043bea40b485f3ce7061a2025-01-12T12:36:06ZengSpringerOpenNano-Micro Letters2311-67062150-55512025-01-0117112810.1007/s40820-024-01625-9Photolithographic Microfabrication of Microbatteries for On-Chip Energy StorageYuan Ma0Sen Wang1Zhong-Shuai Wu2State Key Laboratory of Catalysis, Dalian Institute of Chemical Physics, Chinese Academy of SciencesState Key Laboratory of Catalysis, Dalian Institute of Chemical Physics, Chinese Academy of SciencesState Key Laboratory of Catalysis, Dalian Institute of Chemical Physics, Chinese Academy of SciencesHighlights The fundamental principles and step-by-step procedures of photolithography are introduced, and a nuanced understanding of its operational mechanisms and the criteria for photoresist selection is offered. Various specific roles that photolithography plays in microbatteries (MBs) fabrication, including templates for 2D and 3D micropatterns, MB active components, and the sacrificial layer for constructing micro-Swiss-roll structure, are elaborated. The challenges and future directions of MBs fabricated using photolithography, including materials selection, packaging techniques, application, and performance evaluation, are discussed.https://doi.org/10.1007/s40820-024-01625-9MicrobatteriesPhotolithographyInternet of ThingsMicropatternsOn-chip energy storage |
| spellingShingle | Yuan Ma Sen Wang Zhong-Shuai Wu Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage Nano-Micro Letters Microbatteries Photolithography Internet of Things Micropatterns On-chip energy storage |
| title | Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage |
| title_full | Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage |
| title_fullStr | Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage |
| title_full_unstemmed | Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage |
| title_short | Photolithographic Microfabrication of Microbatteries for On-Chip Energy Storage |
| title_sort | photolithographic microfabrication of microbatteries for on chip energy storage |
| topic | Microbatteries Photolithography Internet of Things Micropatterns On-chip energy storage |
| url | https://doi.org/10.1007/s40820-024-01625-9 |
| work_keys_str_mv | AT yuanma photolithographicmicrofabricationofmicrobatteriesforonchipenergystorage AT senwang photolithographicmicrofabricationofmicrobatteriesforonchipenergystorage AT zhongshuaiwu photolithographicmicrofabricationofmicrobatteriesforonchipenergystorage |