Deep-ultraviolet plasmon resonances on hybrid Si nanostructures for photoluminescence enhancement

Abstract Deep ultraviolet (DUV) nanophotonic technologies are of vital importance for applications in biomedical sensing, advanced lithography, light sources, and optoelectronic devices. Plasmonic nanostructures with DUV resonance properties can generate highly confined optical fields. They therefor...

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Main Authors: Tao Liu, Haowen Chen, Wenxuan Liu, Huazhen Wu, Xing Zhen, Shasha Li, Lei Shao, Shao-Zhi Deng
Format: Article
Language:English
Published: Springer 2025-08-01
Series:Discover Nano
Online Access:https://doi.org/10.1186/s11671-025-04324-5
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author Tao Liu
Haowen Chen
Wenxuan Liu
Huazhen Wu
Xing Zhen
Shasha Li
Lei Shao
Shao-Zhi Deng
author_facet Tao Liu
Haowen Chen
Wenxuan Liu
Huazhen Wu
Xing Zhen
Shasha Li
Lei Shao
Shao-Zhi Deng
author_sort Tao Liu
collection DOAJ
description Abstract Deep ultraviolet (DUV) nanophotonic technologies are of vital importance for applications in biomedical sensing, advanced lithography, light sources, and optoelectronic devices. Plasmonic nanostructures with DUV resonance properties can generate highly confined optical fields. They therefore have great potential in amplifying spectral signals from molecules with intense vibronic transitions in the DUV region and improving the sensitivity of solar-blind detection. However, practical applications of DUV plasmonic structures are hindered by challenges such as oxidation, photo-induced damage, high material loss, and costly fabrication. Herein, we employ hybrid Si Fabry-Pérot nanoresonators constructed from random Si nanodisk arrays and a Si mirror to improve the DUV plasmonic properties of individual Si nanostructures. The hybrid nanoresonators exhibit strong resonance modes that are tunable in the DUV regime, resulting from the coupling between nanodisk plasmon resonances and Fabry-Pérot cavity modes. In addition, we fabricate centimeter-scale nanoresonator arrays that support distinct DUV plasmon resonances using a low-cost hole-mask colloidal lithography method. We further demonstrate that the hybrid Si nanoresonator substrate can enhance the molecular ultraviolet photoluminescence by a factor of up to 2.7. By combining the advantages of Si nanodisks’ DUV localized surface plasmon and Fabry-Pérot cavity resonances, our design offers a promising platform for molecular detection, solar-blind photodetection, and biosensing.
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spelling doaj-art-6b46bccbc66e4a2e8e624e333c1bd32b2025-08-20T03:46:16ZengSpringerDiscover Nano2731-92292025-08-0120111410.1186/s11671-025-04324-5Deep-ultraviolet plasmon resonances on hybrid Si nanostructures for photoluminescence enhancementTao Liu0Haowen Chen1Wenxuan Liu2Huazhen Wu3Xing Zhen4Shasha Li5Lei Shao6Shao-Zhi Deng7State Key Laboratory of Optoelectronic Materials and Technologies, Guangdong Provincial Key Laboratory of Display Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen UniversityState Key Laboratory of Optoelectronic Materials and Technologies, Guangdong Provincial Key Laboratory of Display Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen UniversityState Key Laboratory of Optoelectronic Materials and Technologies, Guangdong Provincial Key Laboratory of Display Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen UniversityState Key Laboratory of Optoelectronic Materials and Technologies, Guangdong Provincial Key Laboratory of Display Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen UniversityState Key Laboratory of Optoelectronic Materials and Technologies, Guangdong Provincial Key Laboratory of Display Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen UniversitySchool of Integrated Circuits, Sun Yat-sen UniversityState Key Laboratory of Optoelectronic Materials and Technologies, Guangdong Provincial Key Laboratory of Display Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen UniversityState Key Laboratory of Optoelectronic Materials and Technologies, Guangdong Provincial Key Laboratory of Display Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen UniversityAbstract Deep ultraviolet (DUV) nanophotonic technologies are of vital importance for applications in biomedical sensing, advanced lithography, light sources, and optoelectronic devices. Plasmonic nanostructures with DUV resonance properties can generate highly confined optical fields. They therefore have great potential in amplifying spectral signals from molecules with intense vibronic transitions in the DUV region and improving the sensitivity of solar-blind detection. However, practical applications of DUV plasmonic structures are hindered by challenges such as oxidation, photo-induced damage, high material loss, and costly fabrication. Herein, we employ hybrid Si Fabry-Pérot nanoresonators constructed from random Si nanodisk arrays and a Si mirror to improve the DUV plasmonic properties of individual Si nanostructures. The hybrid nanoresonators exhibit strong resonance modes that are tunable in the DUV regime, resulting from the coupling between nanodisk plasmon resonances and Fabry-Pérot cavity modes. In addition, we fabricate centimeter-scale nanoresonator arrays that support distinct DUV plasmon resonances using a low-cost hole-mask colloidal lithography method. We further demonstrate that the hybrid Si nanoresonator substrate can enhance the molecular ultraviolet photoluminescence by a factor of up to 2.7. By combining the advantages of Si nanodisks’ DUV localized surface plasmon and Fabry-Pérot cavity resonances, our design offers a promising platform for molecular detection, solar-blind photodetection, and biosensing.https://doi.org/10.1186/s11671-025-04324-5
spellingShingle Tao Liu
Haowen Chen
Wenxuan Liu
Huazhen Wu
Xing Zhen
Shasha Li
Lei Shao
Shao-Zhi Deng
Deep-ultraviolet plasmon resonances on hybrid Si nanostructures for photoluminescence enhancement
Discover Nano
title Deep-ultraviolet plasmon resonances on hybrid Si nanostructures for photoluminescence enhancement
title_full Deep-ultraviolet plasmon resonances on hybrid Si nanostructures for photoluminescence enhancement
title_fullStr Deep-ultraviolet plasmon resonances on hybrid Si nanostructures for photoluminescence enhancement
title_full_unstemmed Deep-ultraviolet plasmon resonances on hybrid Si nanostructures for photoluminescence enhancement
title_short Deep-ultraviolet plasmon resonances on hybrid Si nanostructures for photoluminescence enhancement
title_sort deep ultraviolet plasmon resonances on hybrid si nanostructures for photoluminescence enhancement
url https://doi.org/10.1186/s11671-025-04324-5
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