Failure Analysis and Optimized Simulation Design of Silicon Micromechanical Resonant Accelerometers
To develop solutions to the frequency instability and failure of silicon micromechanical resonant accelerometers, the state characteristics of micromechanical resonant accelerometers are investigated under temperature and vibration stresses. Through theoretical analysis and finite element simulation...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-07-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/25/15/4583 |
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