GHz voltage amplification in a stack of piezoelectric ScAlN and non-piezoelectric SiO2 layers
GHz voltage amplification was found in a stacked structure of piezoelectric layers (such as ScAlN) and non-piezoelectric layers (such as SiO _2 ). This allows for large-area fabrication using commercial equipment. This approach contributes to wireless sensor activation. The electromechanical couplin...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2024-01-01
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| Series: | Applied Physics Express |
| Subjects: | |
| Online Access: | https://doi.org/10.35848/1882-0786/ad8da5 |
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