Fabrication and evaluation of a CMOS-based energy harvesting chip integrating photovoltaic and thermoelectric energy harvesters
This study explores the development of an energy harvesting chip (EHC) using a complementary metal oxide semiconductor (CMOS) process, addressing the need for efficient micro-scale energy harvesters in modern electronics. The EHC integrates a thermoelectric energy harvester (TEH) and a photovoltaic...
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| Language: | English |
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Elsevier
2024-10-01
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| Series: | Energy Conversion and Management: X |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590174524002265 |
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| author | Zhi-Xuan Dai Chun-Yu Chen |
| author_facet | Zhi-Xuan Dai Chun-Yu Chen |
| author_sort | Zhi-Xuan Dai |
| collection | DOAJ |
| description | This study explores the development of an energy harvesting chip (EHC) using a complementary metal oxide semiconductor (CMOS) process, addressing the need for efficient micro-scale energy harvesters in modern electronics. The EHC integrates a thermoelectric energy harvester (TEH) and a photovoltaic energy harvester (PEH) to maximize energy conversion efficiency. A key challenge in TEH design is enhancing power output, which is addressed by suspending the cold ends of 41 thermocouples within the TEH structure through post-processing. Experimental methods were employed to assess the performance of the TEH, revealing an output voltage of 21.4 mV and a maximum output power of 9.32 nW under a 3 K temperature difference. The TEH demonstrated a voltage factor of 8.9 mV/(mm2·K) and a power factor of 1.3 nW/(mm2·K2). The PEH was designed with novel patterned p-n junctions, integrating lightly doped n-type regions with interdigitated p-type doping to increase junction density, resulting in high conversion efficiency. The experimental results confirm the effectiveness of the EHC design, showcasing its potential in energy harvesting applications. |
| format | Article |
| id | doaj-art-61d8a4188a8d4f04ad0f4764f9f52725 |
| institution | Kabale University |
| issn | 2590-1745 |
| language | English |
| publishDate | 2024-10-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Energy Conversion and Management: X |
| spelling | doaj-art-61d8a4188a8d4f04ad0f4764f9f527252024-12-18T08:51:30ZengElsevierEnergy Conversion and Management: X2590-17452024-10-0124100748Fabrication and evaluation of a CMOS-based energy harvesting chip integrating photovoltaic and thermoelectric energy harvestersZhi-Xuan Dai0Chun-Yu Chen1Department of Bio-Industrial Mechatronics Engineering, National Chung Hsing University, Taichung 402, Taiwan; Corresponding author.Chemical Mechanical Polishing Department, Powerchip Semiconductor Manufacturing Corporation, Hsinchu 300, TaiwanThis study explores the development of an energy harvesting chip (EHC) using a complementary metal oxide semiconductor (CMOS) process, addressing the need for efficient micro-scale energy harvesters in modern electronics. The EHC integrates a thermoelectric energy harvester (TEH) and a photovoltaic energy harvester (PEH) to maximize energy conversion efficiency. A key challenge in TEH design is enhancing power output, which is addressed by suspending the cold ends of 41 thermocouples within the TEH structure through post-processing. Experimental methods were employed to assess the performance of the TEH, revealing an output voltage of 21.4 mV and a maximum output power of 9.32 nW under a 3 K temperature difference. The TEH demonstrated a voltage factor of 8.9 mV/(mm2·K) and a power factor of 1.3 nW/(mm2·K2). The PEH was designed with novel patterned p-n junctions, integrating lightly doped n-type regions with interdigitated p-type doping to increase junction density, resulting in high conversion efficiency. The experimental results confirm the effectiveness of the EHC design, showcasing its potential in energy harvesting applications.http://www.sciencedirect.com/science/article/pii/S2590174524002265Thermoelectric energy harvesterEnergy harvesting chipPhotovoltaic energy harvesterCMOS processMEMS |
| spellingShingle | Zhi-Xuan Dai Chun-Yu Chen Fabrication and evaluation of a CMOS-based energy harvesting chip integrating photovoltaic and thermoelectric energy harvesters Energy Conversion and Management: X Thermoelectric energy harvester Energy harvesting chip Photovoltaic energy harvester CMOS process MEMS |
| title | Fabrication and evaluation of a CMOS-based energy harvesting chip integrating photovoltaic and thermoelectric energy harvesters |
| title_full | Fabrication and evaluation of a CMOS-based energy harvesting chip integrating photovoltaic and thermoelectric energy harvesters |
| title_fullStr | Fabrication and evaluation of a CMOS-based energy harvesting chip integrating photovoltaic and thermoelectric energy harvesters |
| title_full_unstemmed | Fabrication and evaluation of a CMOS-based energy harvesting chip integrating photovoltaic and thermoelectric energy harvesters |
| title_short | Fabrication and evaluation of a CMOS-based energy harvesting chip integrating photovoltaic and thermoelectric energy harvesters |
| title_sort | fabrication and evaluation of a cmos based energy harvesting chip integrating photovoltaic and thermoelectric energy harvesters |
| topic | Thermoelectric energy harvester Energy harvesting chip Photovoltaic energy harvester CMOS process MEMS |
| url | http://www.sciencedirect.com/science/article/pii/S2590174524002265 |
| work_keys_str_mv | AT zhixuandai fabricationandevaluationofacmosbasedenergyharvestingchipintegratingphotovoltaicandthermoelectricenergyharvesters AT chunyuchen fabricationandevaluationofacmosbasedenergyharvestingchipintegratingphotovoltaicandthermoelectricenergyharvesters |