Quantification of external disturbance forces in sliding microwire
Due to microscale size and infinitesimal stiffness, the undesirable surface and external forces influence the mechanical behaviors of microstructures. It hinders MEMS functions, degrades reliability, and acts as a disturbance. Since MEMS functions based on microstructure mechanical behaviors, theref...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-01-01
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| Series: | Heliyon |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2405844025003706 |
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