APA (7th ed.) Citation

Flege, S., Hatada, R., Hanauer, A., Ensinger, W., Morimura, T., & Baba, K. Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties. Wiley.

Chicago Style (17th ed.) Citation

Flege, Stefan, Ruriko Hatada, Andreas Hanauer, Wolfgang Ensinger, Takao Morimura, and Koumei Baba. Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties. Wiley.

MLA (9th ed.) Citation

Flege, Stefan, et al. Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties. Wiley.

Warning: These citations may not always be 100% accurate.