Integrated structure for a resonant micro-gyroscope and accelerometer
This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external accelera...
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| Format: | Article |
| Language: | English |
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Gruppo Italiano Frattura
2014-07-01
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| Series: | Fracture and Structural Integrity |
| Subjects: | |
| Online Access: | https://www.fracturae.com/index.php/fis/article/view/1265 |
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| author | V. Zega C. Comi A. Corigliano C. Valzasina |
| author_facet | V. Zega C. Comi A. Corigliano C. Valzasina |
| author_sort | V. Zega |
| collection | DOAJ |
| description | This paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw) on the variation of frequency of several elements set in resonance. The device, despite its small dimensions, provides a differential decoupled detection of four external quantities thanks to the presence of four slender beams resonating in bending and four torsional resonators. |
| format | Article |
| id | doaj-art-5f2871818fc5450182294009389365c0 |
| institution | Kabale University |
| issn | 1971-8993 |
| language | English |
| publishDate | 2014-07-01 |
| publisher | Gruppo Italiano Frattura |
| record_format | Article |
| series | Fracture and Structural Integrity |
| spelling | doaj-art-5f2871818fc5450182294009389365c02025-01-03T00:40:26ZengGruppo Italiano FratturaFracture and Structural Integrity1971-89932014-07-01829Integrated structure for a resonant micro-gyroscope and accelerometerV. ZegaC. ComiA. CoriglianoC. ValzasinaThis paper presents the study of the mechanical behavior of a microstructure designed to detect acceleration and angular velocity simultaneously. The new resonant micro-sensor proposed, fabricated by the ThELMA© surface-micromachining technique, bases detection of two components of external acceleration (one in-plane component and one out-of plane component) and two components of angular velocity (roll and yaw) on the variation of frequency of several elements set in resonance. The device, despite its small dimensions, provides a differential decoupled detection of four external quantities thanks to the presence of four slender beams resonating in bending and four torsional resonators.https://www.fracturae.com/index.php/fis/article/view/1265Resonators |
| spellingShingle | V. Zega C. Comi A. Corigliano C. Valzasina Integrated structure for a resonant micro-gyroscope and accelerometer Fracture and Structural Integrity Resonators |
| title | Integrated structure for a resonant micro-gyroscope and accelerometer |
| title_full | Integrated structure for a resonant micro-gyroscope and accelerometer |
| title_fullStr | Integrated structure for a resonant micro-gyroscope and accelerometer |
| title_full_unstemmed | Integrated structure for a resonant micro-gyroscope and accelerometer |
| title_short | Integrated structure for a resonant micro-gyroscope and accelerometer |
| title_sort | integrated structure for a resonant micro gyroscope and accelerometer |
| topic | Resonators |
| url | https://www.fracturae.com/index.php/fis/article/view/1265 |
| work_keys_str_mv | AT vzega integratedstructureforaresonantmicrogyroscopeandaccelerometer AT ccomi integratedstructureforaresonantmicrogyroscopeandaccelerometer AT acorigliano integratedstructureforaresonantmicrogyroscopeandaccelerometer AT cvalzasina integratedstructureforaresonantmicrogyroscopeandaccelerometer |