Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror
Micro-electro-mechanical system (MEMS) is once proposed in 1970s and evolving rapidly. Current researchers are seeking for better designs and better applications for MEMS actuators. This work presents an electrostatic driven dual-axis scanning micromirror, i.e., two-dimensional (2D) scanning micromi...
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2024-12-01
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| Series: | International Journal of Optomechatronics |
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| Online Access: | https://www.tandfonline.com/doi/10.1080/15599612.2024.2350749 |
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| author | Longqin Wu Yu-Sheng Lin |
| author_facet | Longqin Wu Yu-Sheng Lin |
| author_sort | Longqin Wu |
| collection | DOAJ |
| description | Micro-electro-mechanical system (MEMS) is once proposed in 1970s and evolving rapidly. Current researchers are seeking for better designs and better applications for MEMS actuators. This work presents an electrostatic driven dual-axis scanning micromirror, i.e., two-dimensional (2D) scanning micromirror with mirror size of 500 μm × 500 μm. The scanning mirror is implemented by using bulk micromachining process on silicon on insulator (SOI) substrate, which is compatible with present complementary metal oxide semiconductor (CMOS) manufacturing technology. The scanning frequency of the slow axis and the fast axis is 4.87 kHz and 31.15 kHz, respectively. The impact factors of the dimensions of comb fingers and torsion beams are analyzed and discussed in this study. Under the driving voltage difference of 100 volts and 70 volts, the deviation angle is 4.57° × 13.08°. Therefore, a simple design of a dual-axis MEMS scanning micromirror is proposed, which can be precisely controlled without additional complex sensors or circuits. |
| format | Article |
| id | doaj-art-5b8a0198be1d414aac36bb2a6d851e4f |
| institution | Kabale University |
| issn | 1559-9612 1559-9620 |
| language | English |
| publishDate | 2024-12-01 |
| publisher | Taylor & Francis Group |
| record_format | Article |
| series | International Journal of Optomechatronics |
| spelling | doaj-art-5b8a0198be1d414aac36bb2a6d851e4f2024-12-13T09:02:34ZengTaylor & Francis GroupInternational Journal of Optomechatronics1559-96121559-96202024-12-0118110.1080/15599612.2024.2350749Design and investigation of dual-axis electrostatic driving MEMS scanning micromirrorLongqin Wu0Yu-Sheng Lin1School of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou, ChinaSchool of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou, ChinaMicro-electro-mechanical system (MEMS) is once proposed in 1970s and evolving rapidly. Current researchers are seeking for better designs and better applications for MEMS actuators. This work presents an electrostatic driven dual-axis scanning micromirror, i.e., two-dimensional (2D) scanning micromirror with mirror size of 500 μm × 500 μm. The scanning mirror is implemented by using bulk micromachining process on silicon on insulator (SOI) substrate, which is compatible with present complementary metal oxide semiconductor (CMOS) manufacturing technology. The scanning frequency of the slow axis and the fast axis is 4.87 kHz and 31.15 kHz, respectively. The impact factors of the dimensions of comb fingers and torsion beams are analyzed and discussed in this study. Under the driving voltage difference of 100 volts and 70 volts, the deviation angle is 4.57° × 13.08°. Therefore, a simple design of a dual-axis MEMS scanning micromirror is proposed, which can be precisely controlled without additional complex sensors or circuits.https://www.tandfonline.com/doi/10.1080/15599612.2024.2350749MEMSelectrostatic actuatorscanning mirrordynamical control |
| spellingShingle | Longqin Wu Yu-Sheng Lin Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror International Journal of Optomechatronics MEMS electrostatic actuator scanning mirror dynamical control |
| title | Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror |
| title_full | Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror |
| title_fullStr | Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror |
| title_full_unstemmed | Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror |
| title_short | Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror |
| title_sort | design and investigation of dual axis electrostatic driving mems scanning micromirror |
| topic | MEMS electrostatic actuator scanning mirror dynamical control |
| url | https://www.tandfonline.com/doi/10.1080/15599612.2024.2350749 |
| work_keys_str_mv | AT longqinwu designandinvestigationofdualaxiselectrostaticdrivingmemsscanningmicromirror AT yushenglin designandinvestigationofdualaxiselectrostaticdrivingmemsscanningmicromirror |