Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches

Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches

Electrostatically actuated microelectromechanical system (MEMS) switches with fixed- fixed beams were fabricated. FEM modeling was used to calculate the contributions of stress in the fabricated beams from the measured values of pull-in voltage. The reported study provides useful guidelines to optim...

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Bibliographic Details
Main Authors: Anna Persano, Girolamo Tagliapietra, Jacopo Iannacci, Alvise Bagolini, Fabio Quaranta, Pietro Siciliano
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Proceedings
Subjects:
MEMS
fixed-fixed beam
pull-in voltage
residual stress
Online Access:https://www.mdpi.com/2504-3900/97/1/174
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