Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches
Electrostatically actuated microelectromechanical system (MEMS) switches with fixed- fixed beams were fabricated. FEM modeling was used to calculate the contributions of stress in the fabricated beams from the measured values of pull-in voltage. The reported study provides useful guidelines to optim...
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MDPI AG
2024-04-01
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| Online Access: | https://www.mdpi.com/2504-3900/97/1/174 |
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| author | Anna Persano Girolamo Tagliapietra Jacopo Iannacci Alvise Bagolini Fabio Quaranta Pietro Siciliano |
| author_facet | Anna Persano Girolamo Tagliapietra Jacopo Iannacci Alvise Bagolini Fabio Quaranta Pietro Siciliano |
| author_sort | Anna Persano |
| collection | DOAJ |
| description | Electrostatically actuated microelectromechanical system (MEMS) switches with fixed- fixed beams were fabricated. FEM modeling was used to calculate the contributions of stress in the fabricated beams from the measured values of pull-in voltage. The reported study provides useful guidelines to optimize the design of fixed-fixed beams, in order to reduce the stress contributions for the successful development of efficient and reliable electrostatically actuated MEMS devices. |
| format | Article |
| id | doaj-art-58633be6820b422e94eaa3c42e2af9c7 |
| institution | Kabale University |
| issn | 2504-3900 |
| language | English |
| publishDate | 2024-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj-art-58633be6820b422e94eaa3c42e2af9c72024-12-27T14:49:03ZengMDPI AGProceedings2504-39002024-04-0197117410.3390/proceedings2024097174Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS SwitchesAnna Persano0Girolamo Tagliapietra1Jacopo Iannacci2Alvise Bagolini3Fabio Quaranta4Pietro Siciliano5IMM-CNR, Institute for Microelectronics and Microsystems, National Research Council, Via Monteroni, 73100 Lecce, ItalySD FBK, Center for Sensors and Devices, Fondazione Bruno Kessler, Via Sommarive 18, Povo, 38123 Trento, ItalySD FBK, Center for Sensors and Devices, Fondazione Bruno Kessler, Via Sommarive 18, Povo, 38123 Trento, ItalySD FBK, Center for Sensors and Devices, Fondazione Bruno Kessler, Via Sommarive 18, Povo, 38123 Trento, ItalyIMM-CNR, Institute for Microelectronics and Microsystems, National Research Council, Via Monteroni, 73100 Lecce, ItalyIMM-CNR, Institute for Microelectronics and Microsystems, National Research Council, Via Monteroni, 73100 Lecce, ItalyElectrostatically actuated microelectromechanical system (MEMS) switches with fixed- fixed beams were fabricated. FEM modeling was used to calculate the contributions of stress in the fabricated beams from the measured values of pull-in voltage. The reported study provides useful guidelines to optimize the design of fixed-fixed beams, in order to reduce the stress contributions for the successful development of efficient and reliable electrostatically actuated MEMS devices.https://www.mdpi.com/2504-3900/97/1/174MEMSfixed-fixed beampull-in voltageresidual stress |
| spellingShingle | Anna Persano Girolamo Tagliapietra Jacopo Iannacci Alvise Bagolini Fabio Quaranta Pietro Siciliano Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches Proceedings MEMS fixed-fixed beam pull-in voltage residual stress |
| title | Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches |
| title_full | Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches |
| title_fullStr | Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches |
| title_full_unstemmed | Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches |
| title_short | Pull-In Voltage and Stress in Fixed-Fixed Beams of RF MEMS Switches |
| title_sort | pull in voltage and stress in fixed fixed beams of rf mems switches |
| topic | MEMS fixed-fixed beam pull-in voltage residual stress |
| url | https://www.mdpi.com/2504-3900/97/1/174 |
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