APA (7th ed.) Citation

Solodukha, V. A., Belous, A. I., & Chyhir, G. G. DEPTH MEASUREMENT OF DISRUPTED LAYER ON SILICON WAFER SURFACE USING AUGER SPECTROSCOPY METHOD. Belarusian National Technical University.

Chicago Style (17th ed.) Citation

Solodukha, V. A., A. I. Belous, and G. G. Chyhir. DEPTH MEASUREMENT OF DISRUPTED LAYER ON SILICON WAFER SURFACE USING AUGER SPECTROSCOPY METHOD. Belarusian National Technical University.

MLA (9th ed.) Citation

Solodukha, V. A., et al. DEPTH MEASUREMENT OF DISRUPTED LAYER ON SILICON WAFER SURFACE USING AUGER SPECTROSCOPY METHOD. Belarusian National Technical University.