Model-Based ILC with a Modified Q-Filter for Complex Motion Systems: Practical Considerations and Experimental Verification on a Wafer Stage
Iterative learning control (ILC) is one of the most popular tracking control methods for systems that repeatedly execute the same task. A system model is usually used in the analysis and design of ILC. Model-based ILC results in general in fast convergence and good performance. However, the model un...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2018-01-01
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| Series: | Complexity |
| Online Access: | http://dx.doi.org/10.1155/2018/5406035 |
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