Thickness dependence of the mechanical properties of piezoelectric high-Qm nanomechanical resonators made from aluminium nitride

Thickness dependence of the mechanical properties of piezoelectric high-Qm nanomechanical resonators made from aluminium nitride

Nanomechanical resonators with high quality factors ( Q _m ) enable mechanics-based quantum technologies, in particular quantum sensing and quantum transduction. High- Q _m nanomechanical resonators in the kHz to MHz frequency range can be realized in tensile-strained thin films that allow the use o...

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Bibliographic Details
Main Authors: Anastasiia Ciers, Alexander Jung, Joachim Ciers, Laurentius Radit Nindito, Hannes Pfeifer, Armin Dadgar, Jürgen Bläsing, André Strittmatter, Witlef Wieczorek
Format: Article
Language:English
Published: IOP Publishing 2024-01-01
Series:Materials for Quantum Technology
Subjects:
nanomechanics
sensing
nanotechnology
appled physics
quantum technology
Online Access:https://doi.org/10.1088/2633-4356/ad9b64
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