Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor

Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor

We developed a new approach to the fabrication of MEMS (Microelectromechanical system) substrates for gas sensors. This full screen-printing approach consists in the application of sacrificial material, which is solid at the near-room temperature of printing and becomes powder after firing of the el...

Full description

Saved in:
Bibliographic Details
Main Authors: Oleg Kul, Alexey Vasiliev, Andrey Nikitin, Anna Dmitrieva, Alexandr Bolshakov
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Proceedings
Subjects:
ceramic MEMS
screen printing
MOX
thermocatalytic sensor
Online Access:https://www.mdpi.com/2504-3900/97/1/128
Tags: Add Tag
No Tags, Be the first to tag this record!

Similar Items

Similar Items