Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor
We developed a new approach to the fabrication of MEMS (Microelectromechanical system) substrates for gas sensors. This full screen-printing approach consists in the application of sacrificial material, which is solid at the near-room temperature of printing and becomes powder after firing of the el...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-04-01
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| Series: | Proceedings |
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| Online Access: | https://www.mdpi.com/2504-3900/97/1/128 |
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| author | Oleg Kul Alexey Vasiliev Andrey Nikitin Anna Dmitrieva Alexandr Bolshakov |
| author_facet | Oleg Kul Alexey Vasiliev Andrey Nikitin Anna Dmitrieva Alexandr Bolshakov |
| author_sort | Oleg Kul |
| collection | DOAJ |
| description | We developed a new approach to the fabrication of MEMS (Microelectromechanical system) substrates for gas sensors. This full screen-printing approach consists in the application of sacrificial material, which is solid at the near-room temperature of printing and becomes powder after firing of the elements of the sensor and, therefore, can be removed from under the suspended elements of the MEMS structure in an ultrasonic bath. The glass–ceramic MEMS is a cantilever structure equipped with a Pt-based microheater on the end edge with the sensing layer. Screen-printing provides cheap fabrication, robustness, and low power (~120 mW at 450 °C) for the sensing element. |
| format | Article |
| id | doaj-art-541e0f7ca73f46b9942dfd630b3ada8c |
| institution | Kabale University |
| issn | 2504-3900 |
| language | English |
| publishDate | 2024-04-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj-art-541e0f7ca73f46b9942dfd630b3ada8c2024-12-27T14:48:55ZengMDPI AGProceedings2504-39002024-04-0197112810.3390/proceedings2024097128Screen-Printed Ceramic MEMS for Metal Oxide Gas SensorOleg Kul0Alexey Vasiliev1Andrey Nikitin2Anna Dmitrieva3Alexandr Bolshakov4LLC “C-Component”, Tushinskaya Strt., 17, 125362 Moscow, RussiaLLC “C-Component”, Tushinskaya Strt., 17, 125362 Moscow, RussiaLLC “C-Component”, Tushinskaya Strt., 17, 125362 Moscow, RussiaLLC “C-Component”, Tushinskaya Strt., 17, 125362 Moscow, RussiaLLC “C-Component”, Tushinskaya Strt., 17, 125362 Moscow, RussiaWe developed a new approach to the fabrication of MEMS (Microelectromechanical system) substrates for gas sensors. This full screen-printing approach consists in the application of sacrificial material, which is solid at the near-room temperature of printing and becomes powder after firing of the elements of the sensor and, therefore, can be removed from under the suspended elements of the MEMS structure in an ultrasonic bath. The glass–ceramic MEMS is a cantilever structure equipped with a Pt-based microheater on the end edge with the sensing layer. Screen-printing provides cheap fabrication, robustness, and low power (~120 mW at 450 °C) for the sensing element.https://www.mdpi.com/2504-3900/97/1/128ceramic MEMSscreen printingMOXthermocatalytic sensor |
| spellingShingle | Oleg Kul Alexey Vasiliev Andrey Nikitin Anna Dmitrieva Alexandr Bolshakov Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor Proceedings ceramic MEMS screen printing MOX thermocatalytic sensor |
| title | Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor |
| title_full | Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor |
| title_fullStr | Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor |
| title_full_unstemmed | Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor |
| title_short | Screen-Printed Ceramic MEMS for Metal Oxide Gas Sensor |
| title_sort | screen printed ceramic mems for metal oxide gas sensor |
| topic | ceramic MEMS screen printing MOX thermocatalytic sensor |
| url | https://www.mdpi.com/2504-3900/97/1/128 |
| work_keys_str_mv | AT olegkul screenprintedceramicmemsformetaloxidegassensor AT alexeyvasiliev screenprintedceramicmemsformetaloxidegassensor AT andreynikitin screenprintedceramicmemsformetaloxidegassensor AT annadmitrieva screenprintedceramicmemsformetaloxidegassensor AT alexandrbolshakov screenprintedceramicmemsformetaloxidegassensor |