Simulation of film bulk acoustic resonator based on two-dimensional phononic crystals
A new structure of film bulk acoustic resonator (FBAR) based on phononic crystal (PnC) was proposed.The phononic crystal was used as the acoustic reflection layer at the bottom of the bulk acoustic wave resonator, which has the characteristics of high reflectivity and low transmittance of elastic wa...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
China InfoCom Media Group
2022-03-01
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| Series: | 物联网学报 |
| Subjects: | |
| Online Access: | http://www.wlwxb.com.cn/zh/article/doi/10.11959/j.issn.2096-3750.2022.00251/ |
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