Advanced Nested Coaxial Thin-Film ZnO Nanostructures Synthesized by Atomic Layer Deposition for Improved Sensing Performance

Advanced Nested Coaxial Thin-Film ZnO Nanostructures Synthesized by Atomic Layer Deposition for Improved Sensing Performance

We report a new synthesis method for multiple-walled nested thin-film nanostructures by combining hydrothermal growth methods with atomic layer deposition (ALD) thin-film technology and sacrificial films, thereby increasing the surface-to-volume ratio to improve the sensing performance of novel ZnO...

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Bibliographic Details
Main Authors:	Pengtao Lin, Lari S. Zhang, Kai Zhang, Helmut Baumgart
Format:	Article
Language:	English
Published:	MDPI AG 2024-11-01
Series:	Applied Sciences
Subjects:	atomic layer deposition (ALD) synthesis of nested thin-film nanostructures ZnO thin films sacrificial Al<sub>2</sub>O<sub>3</sub> thin films gas sensors nanorod/nanotube nanostructures
Online Access:	https://www.mdpi.com/2076-3417/14/23/10959
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