A thermo-mechanical coupling load model for high-frequency piezoelectric ultrasonic transducer
The ultrasonic micromachining systems significantly improve machining efficiency and quality, which are increasingly being applied in the manufacturing of microstructures and micro parts. However, the mechanical and thermal loads of the high-frequency piezoelectric ultrasonic transducer (HPUT) of ul...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2024-12-01
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| Series: | Ultrasonics Sonochemistry |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S1350417724003973 |
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