APA (7th ed.) Citation

Jeon, M., Khambampati, A. K., Song, J. H., Yoon, K. J., & Kim, K. Y. Industrial Monitoring of Residue Deposition in Semiconductor Process Exhaust Pipelines Using Electrical Capacitance Measurements. IEEE.

Chicago Style (17th ed.) Citation

Jeon, Minho, Anil Kumar Khambampati, Jong Hyun Song, Keun Joong Yoon, and Kyung Youn Kim. Industrial Monitoring of Residue Deposition in Semiconductor Process Exhaust Pipelines Using Electrical Capacitance Measurements. IEEE.

MLA (9th ed.) Citation

Jeon, Minho, et al. Industrial Monitoring of Residue Deposition in Semiconductor Process Exhaust Pipelines Using Electrical Capacitance Measurements. IEEE.