A Laterally Excited Bulk Acoustic Wave Resonator Based on LiNbO<sub>3</sub> with Arc-Shaped Electrodes

A Laterally Excited Bulk Acoustic Wave Resonator Based on LiNbO<sub>3</sub> with Arc-Shaped Electrodes

High frequency and large bandwidth are growing trends in communication radio-frequency devices. The LiNbO<sub>3</sub> thin film material is expected to become the preferred piezoelectric material for high coupling resonators in the 5G frequency band due to its ultra-high piezoelectric co...

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Bibliographic Details
Main Authors: Jieyu Liu, Wenjuan Liu, Zhiwei Wen, Min Zeng, Chengliang Sun
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Micromachines
Subjects:
XBAR
arc-shaped electrode
electromechanical coupling coefficient
spurious modes
Online Access:https://www.mdpi.com/2072-666X/15/11/1367
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