Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications

Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications

Electrothermal actuators are highly advantageous for microelectromechanical systems (MEMS) due to their capability to generate significant force and large displacements. Despite these benefits, their application in reconfigurable conduction line switches is limited, particularly when employing comme...

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Bibliographic Details
Main Authors: Abdurrashid Hassan Shuaibu, Almur A. S. Rabih, Yves Blaquière, Frederic Nabki
Format: Article
Language:English
Published: MDPI AG 2024-10-01
Series:Micromachines
Subjects:
electrothermal actuator
microelectromechanical systems (MEMS)
PiezoMUMPs
DC MEMS switch
Si-to-Si contact resistance
Online Access:https://www.mdpi.com/2072-666X/15/11/1295
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