Proton beam writing: World experience and prospectives in Ukraine
Proton beam writing is a promising lithography method that is being developed in many countries. This method has significant advantages over other lithography methods, amongst all, there is the absence of the need for prefabricated pattern masks and a high aspect ratio of fabricated structures. Nume...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
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Institute for Nuclear Research, National Academy of Sciences of Ukraine
2023-03-01
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| Series: | Ядерна фізика та енергетика |
| Subjects: | |
| Online Access: | http://jnpae.kinr.kiev.ua/24.1/Articles_PDF/jnpae-2023-24-0072-Polozhii.pdf |
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| _version_ | 1849306234153336832 |
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| author | H. Ye. Polozhii A. G. Ponomarev S. V. Kolinko V. A. Rebrov R. O. Shulipa O. M. Kalinkevich O. V. Kalinkevich |
| author_facet | H. Ye. Polozhii A. G. Ponomarev S. V. Kolinko V. A. Rebrov R. O. Shulipa O. M. Kalinkevich O. V. Kalinkevich |
| author_sort | H. Ye. Polozhii |
| collection | DOAJ |
| description | Proton beam writing is a promising lithography method that is being developed in many countries. This method has significant advantages over other lithography methods, amongst all, there is the absence of the need for prefabricated pattern masks and a high aspect ratio of fabricated structures. Numerous publications demonstrate prospective applications of proton beam writing in different fields related to micro- and nanostructures fabrication. Proton beam writing may be used both for nanoelectronics and three-dimensional microstructures with a high aspect ratio. Work on proton beam writing technology is being conducted at the Institute of Applied Physics of the National Academy of Sciences of Ukraine. Last years there were introduced vector proton beam writing method, an electrostatic blanker system for proton beam distortion, and experiments on proton beam writing on chitosan films were conducted, including the films covered with thin films of metals and metal compounds. |
| format | Article |
| id | doaj-art-3608b5a56c2f40e9a6c7e9bf784768dc |
| institution | Kabale University |
| issn | 1818-331X 2074-0565 |
| language | English |
| publishDate | 2023-03-01 |
| publisher | Institute for Nuclear Research, National Academy of Sciences of Ukraine |
| record_format | Article |
| series | Ядерна фізика та енергетика |
| spelling | doaj-art-3608b5a56c2f40e9a6c7e9bf784768dc2025-08-20T03:55:07ZengInstitute for Nuclear Research, National Academy of Sciences of UkraineЯдерна фізика та енергетика1818-331X2074-05652023-03-01247280https://doi.org/10.15407/jnpae2023.01.072Proton beam writing: World experience and prospectives in UkraineH. Ye. Polozhii0A. G. Ponomarev1S. V. Kolinko2V. A. Rebrov3R. O. Shulipa4O. M. Kalinkevich5O. V. Kalinkevich6Institute of Applied Physics, National Academy of Sciences of Ukraine, Sumy, UkraineInstitute of Applied Physics, National Academy of Sciences of Ukraine, Sumy, UkraineInstitute of Applied Physics, National Academy of Sciences of Ukraine, Sumy, UkraineInstitute of Applied Physics, National Academy of Sciences of Ukraine, Sumy, UkraineInstitute of Applied Physics, National Academy of Sciences of Ukraine, Sumy, UkraineInstitute of Applied Physics, National Academy of Sciences of Ukraine, Sumy, UkraineInstitute of Applied Physics, National Academy of Sciences of Ukraine, Sumy, UkraineProton beam writing is a promising lithography method that is being developed in many countries. This method has significant advantages over other lithography methods, amongst all, there is the absence of the need for prefabricated pattern masks and a high aspect ratio of fabricated structures. Numerous publications demonstrate prospective applications of proton beam writing in different fields related to micro- and nanostructures fabrication. Proton beam writing may be used both for nanoelectronics and three-dimensional microstructures with a high aspect ratio. Work on proton beam writing technology is being conducted at the Institute of Applied Physics of the National Academy of Sciences of Ukraine. Last years there were introduced vector proton beam writing method, an electrostatic blanker system for proton beam distortion, and experiments on proton beam writing on chitosan films were conducted, including the films covered with thin films of metals and metal compounds.http://jnpae.kinr.kiev.ua/24.1/Articles_PDF/jnpae-2023-24-0072-Polozhii.pdflithographyproton beam writingnanolithographymicrolithographythree-dimensional lithographysmall-sized structurechitosan. |
| spellingShingle | H. Ye. Polozhii A. G. Ponomarev S. V. Kolinko V. A. Rebrov R. O. Shulipa O. M. Kalinkevich O. V. Kalinkevich Proton beam writing: World experience and prospectives in Ukraine Ядерна фізика та енергетика lithography proton beam writing nanolithography microlithography three-dimensional lithography small-sized structure chitosan. |
| title | Proton beam writing: World experience and prospectives in Ukraine |
| title_full | Proton beam writing: World experience and prospectives in Ukraine |
| title_fullStr | Proton beam writing: World experience and prospectives in Ukraine |
| title_full_unstemmed | Proton beam writing: World experience and prospectives in Ukraine |
| title_short | Proton beam writing: World experience and prospectives in Ukraine |
| title_sort | proton beam writing world experience and prospectives in ukraine |
| topic | lithography proton beam writing nanolithography microlithography three-dimensional lithography small-sized structure chitosan. |
| url | http://jnpae.kinr.kiev.ua/24.1/Articles_PDF/jnpae-2023-24-0072-Polozhii.pdf |
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