Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emitters
Color centers in diamond play a central role in the development of quantum photonic technologies, and their importance is only expected to grow in the near future. For many quantum applications, high collection efficiency from individual emitters is required, but the refractive index mismatch betwee...
Saved in:
| Main Authors: | , , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
De Gruyter
2024-03-01
|
| Series: | Nanophotonics |
| Subjects: | |
| Online Access: | https://doi.org/10.1515/nanoph-2023-0877 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1846157293764214784 |
|---|---|
| author | Almutlaq Jawaher Kelley Kyle P. Choi Hyeongrak Li Linsen Lawrie Benjamin Dyck Ondrej Englund Dirk Jesse Stephen |
| author_facet | Almutlaq Jawaher Kelley Kyle P. Choi Hyeongrak Li Linsen Lawrie Benjamin Dyck Ondrej Englund Dirk Jesse Stephen |
| author_sort | Almutlaq Jawaher |
| collection | DOAJ |
| description | Color centers in diamond play a central role in the development of quantum photonic technologies, and their importance is only expected to grow in the near future. For many quantum applications, high collection efficiency from individual emitters is required, but the refractive index mismatch between diamond and air limits the optimal collection efficiency with conventional diamond device geometries. While different out-coupling methods with near-unity efficiency exist, many have yet to be realized due to current limitations in nanofabrication methods, especially for mechanically hard materials like diamond. Here, we leverage electron-beam-induced etching to modify Sn-implanted diamond quantum microchiplets containing integrated waveguides with a width and thickness of 280 nm and 200 nm, respectively. This approach allows for simultaneous high-resolution imaging and modification of the host matrix with an open geometry and direct writing. When coupled with the cathodoluminescence signal generated from the electron–emitter interactions, we can monitor the enhancement of the quantum emitters in real-time with nanoscale spatial resolution. The operando cathodoluminescence measurement and fabrication around single photon emitters demonstrated here provide a new foundation for the potential control of emitter–cavity interactions in integrated quantum photonics. |
| format | Article |
| id | doaj-art-34fa78869f70427e86553da321d4bc57 |
| institution | Kabale University |
| issn | 2192-8614 |
| language | English |
| publishDate | 2024-03-01 |
| publisher | De Gruyter |
| record_format | Article |
| series | Nanophotonics |
| spelling | doaj-art-34fa78869f70427e86553da321d4bc572024-11-25T11:19:12ZengDe GruyterNanophotonics2192-86142024-03-0113122251225810.1515/nanoph-2023-0877Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emittersAlmutlaq Jawaher0Kelley Kyle P.1Choi Hyeongrak2Li Linsen3Lawrie Benjamin4Dyck Ondrej5Englund Dirk6Jesse Stephen72167Massachusetts Institute of Technology, Cambridge, MA, USACenter for Nanophase Materials Sciences, 518778Oak Ridge National Laboratory, Oak Ridge, TN, USA2167Massachusetts Institute of Technology, Cambridge, MA, USA2167Massachusetts Institute of Technology, Cambridge, MA, USAMaterials Science and Technology Division, 551591Oak Ridge National Laboratory, Oak Ridge, TN, USACenter for Nanophase Materials Sciences, 518778Oak Ridge National Laboratory, Oak Ridge, TN, USA2167Massachusetts Institute of Technology, Cambridge, MA, USACenter for Nanophase Materials Sciences, 518778Oak Ridge National Laboratory, Oak Ridge, TN, USAColor centers in diamond play a central role in the development of quantum photonic technologies, and their importance is only expected to grow in the near future. For many quantum applications, high collection efficiency from individual emitters is required, but the refractive index mismatch between diamond and air limits the optimal collection efficiency with conventional diamond device geometries. While different out-coupling methods with near-unity efficiency exist, many have yet to be realized due to current limitations in nanofabrication methods, especially for mechanically hard materials like diamond. Here, we leverage electron-beam-induced etching to modify Sn-implanted diamond quantum microchiplets containing integrated waveguides with a width and thickness of 280 nm and 200 nm, respectively. This approach allows for simultaneous high-resolution imaging and modification of the host matrix with an open geometry and direct writing. When coupled with the cathodoluminescence signal generated from the electron–emitter interactions, we can monitor the enhancement of the quantum emitters in real-time with nanoscale spatial resolution. The operando cathodoluminescence measurement and fabrication around single photon emitters demonstrated here provide a new foundation for the potential control of emitter–cavity interactions in integrated quantum photonics.https://doi.org/10.1515/nanoph-2023-0877diamond chipletscolor centers in diamondsnv− electron-beam-induced etching (ebie)cathodoluminescence |
| spellingShingle | Almutlaq Jawaher Kelley Kyle P. Choi Hyeongrak Li Linsen Lawrie Benjamin Dyck Ondrej Englund Dirk Jesse Stephen Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emitters Nanophotonics diamond chiplets color centers in diamond snv− electron-beam-induced etching (ebie) cathodoluminescence |
| title | Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emitters |
| title_full | Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emitters |
| title_fullStr | Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emitters |
| title_full_unstemmed | Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emitters |
| title_short | Closed-loop electron-beam-induced spectroscopy and nanofabrication around individual quantum emitters |
| title_sort | closed loop electron beam induced spectroscopy and nanofabrication around individual quantum emitters |
| topic | diamond chiplets color centers in diamond snv− electron-beam-induced etching (ebie) cathodoluminescence |
| url | https://doi.org/10.1515/nanoph-2023-0877 |
| work_keys_str_mv | AT almutlaqjawaher closedloopelectronbeaminducedspectroscopyandnanofabricationaroundindividualquantumemitters AT kelleykylep closedloopelectronbeaminducedspectroscopyandnanofabricationaroundindividualquantumemitters AT choihyeongrak closedloopelectronbeaminducedspectroscopyandnanofabricationaroundindividualquantumemitters AT lilinsen closedloopelectronbeaminducedspectroscopyandnanofabricationaroundindividualquantumemitters AT lawriebenjamin closedloopelectronbeaminducedspectroscopyandnanofabricationaroundindividualquantumemitters AT dyckondrej closedloopelectronbeaminducedspectroscopyandnanofabricationaroundindividualquantumemitters AT englunddirk closedloopelectronbeaminducedspectroscopyandnanofabricationaroundindividualquantumemitters AT jessestephen closedloopelectronbeaminducedspectroscopyandnanofabricationaroundindividualquantumemitters |