WO<sub>3</sub>-Based Thin Films Grown by Pulsed Laser Deposition as Gas Sensors for NO<sub>2</sub> Detection
Thin films based on tungsten oxide (WO<sub>3</sub>) were grown by nanosecond pulsed laser deposition on alumina printed-circuit boards to fabricate electrochemical sensors for nitrogen dioxide (NO<sub>2</sub>) detection. Samples exposed to thermal annealing (400 °C for 3 h) w...
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MDPI AG
2024-11-01
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| Online Access: | https://www.mdpi.com/1424-8220/24/22/7366 |
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| author | Alessandro Bellucci Angela De Bonis Mariangela Curcio Antonio Santagata Maria Lucia Pace Eleonora Bolli Matteo Mastellone Riccardo Polini Raffaella Salerno Veronica Valentini Daniele M. Trucchi |
| author_facet | Alessandro Bellucci Angela De Bonis Mariangela Curcio Antonio Santagata Maria Lucia Pace Eleonora Bolli Matteo Mastellone Riccardo Polini Raffaella Salerno Veronica Valentini Daniele M. Trucchi |
| author_sort | Alessandro Bellucci |
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| description | Thin films based on tungsten oxide (WO<sub>3</sub>) were grown by nanosecond pulsed laser deposition on alumina printed-circuit boards to fabricate electrochemical sensors for nitrogen dioxide (NO<sub>2</sub>) detection. Samples exposed to thermal annealing (400 °C for 3 h) were also produced to compare the main properties and the sensor performance. Before gas testing, the morphology and structural properties were investigated. Scanning electron microscopy and atomic force microscopy showed the formation of granular films with a more compact structure before the thermal treatment. Features of the main WO<sub>3</sub> phases were identified for both as-deposited and annealed samples by Raman spectroscopy, whereas X-ray diffraction evidenced the amorphous nature of the as-deposited samples and the formation of crystalline phases after thermal annealing. The as-deposited samples showed a higher W/O ratio, as displayed by energy-dispersive X-ray spectroscopy. An Arrhenius plot revealed a lower activation energy (0.11 eV) for the as-deposited thin films, which are the most electrically conductive samples, presenting a better gas response (30% higher than the response of the annealed ones) in the investigated NO<sub>2</sub> concentration range of 5–20 ppm at the moderate device operating temperature of 75 °C. This behavior is explained by a larger quantity of oxygen vacancies, which enhances the sensing mechanism. |
| format | Article |
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| institution | Kabale University |
| issn | 1424-8220 |
| language | English |
| publishDate | 2024-11-01 |
| publisher | MDPI AG |
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| series | Sensors |
| spelling | doaj-art-2e5a15c6b8e04d688190e4443a33d46a2024-11-26T18:21:43ZengMDPI AGSensors1424-82202024-11-012422736610.3390/s24227366WO<sub>3</sub>-Based Thin Films Grown by Pulsed Laser Deposition as Gas Sensors for NO<sub>2</sub> DetectionAlessandro Bellucci0Angela De Bonis1Mariangela Curcio2Antonio Santagata3Maria Lucia Pace4Eleonora Bolli5Matteo Mastellone6Riccardo Polini7Raffaella Salerno8Veronica Valentini9Daniele M. Trucchi10DiaTHEMA Lab, CNR-ISM, Montelibretti Branch, Via Salaria km 29.300, Monterotondo, 00015 Rome, ItalyDipartimento di Scienze, Università degli Studi della Basilicata, Via dell’Ateneo Lucano 10, 85100 Potenza, ItalyDipartimento di Scienze, Università degli Studi della Basilicata, Via dell’Ateneo Lucano 10, 85100 Potenza, ItalyFemtoLAB, CNR-ISM, Tito Scalo Branch, Zona Industriale, Tito, 85050 Potenza, ItalyFemtoLAB, CNR-ISM, Tito Scalo Branch, Zona Industriale, Tito, 85050 Potenza, ItalyDiaTHEMA Lab, CNR-ISM, Montelibretti Branch, Via Salaria km 29.300, Monterotondo, 00015 Rome, ItalyFemtoLAB, CNR-ISM, Tito Scalo Branch, Zona Industriale, Tito, 85050 Potenza, ItalyDipartimento di Scienze e Tecnologie Chimiche, Università di Roma ‘Tor Vergata’, 00133 Rome, ItalyDiaTHEMA Lab, CNR-ISM, Montelibretti Branch, Via Salaria km 29.300, Monterotondo, 00015 Rome, ItalyDiaTHEMA Lab, CNR-ISM, Montelibretti Branch, Via Salaria km 29.300, Monterotondo, 00015 Rome, ItalyDiaTHEMA Lab, CNR-ISM, Montelibretti Branch, Via Salaria km 29.300, Monterotondo, 00015 Rome, ItalyThin films based on tungsten oxide (WO<sub>3</sub>) were grown by nanosecond pulsed laser deposition on alumina printed-circuit boards to fabricate electrochemical sensors for nitrogen dioxide (NO<sub>2</sub>) detection. Samples exposed to thermal annealing (400 °C for 3 h) were also produced to compare the main properties and the sensor performance. Before gas testing, the morphology and structural properties were investigated. Scanning electron microscopy and atomic force microscopy showed the formation of granular films with a more compact structure before the thermal treatment. Features of the main WO<sub>3</sub> phases were identified for both as-deposited and annealed samples by Raman spectroscopy, whereas X-ray diffraction evidenced the amorphous nature of the as-deposited samples and the formation of crystalline phases after thermal annealing. The as-deposited samples showed a higher W/O ratio, as displayed by energy-dispersive X-ray spectroscopy. An Arrhenius plot revealed a lower activation energy (0.11 eV) for the as-deposited thin films, which are the most electrically conductive samples, presenting a better gas response (30% higher than the response of the annealed ones) in the investigated NO<sub>2</sub> concentration range of 5–20 ppm at the moderate device operating temperature of 75 °C. This behavior is explained by a larger quantity of oxygen vacancies, which enhances the sensing mechanism.https://www.mdpi.com/1424-8220/24/22/7366pulsed laser depositionthin filmstungsten oxidegas sensingsurface oxygen vacanciesthermal annealing |
| spellingShingle | Alessandro Bellucci Angela De Bonis Mariangela Curcio Antonio Santagata Maria Lucia Pace Eleonora Bolli Matteo Mastellone Riccardo Polini Raffaella Salerno Veronica Valentini Daniele M. Trucchi WO<sub>3</sub>-Based Thin Films Grown by Pulsed Laser Deposition as Gas Sensors for NO<sub>2</sub> Detection Sensors pulsed laser deposition thin films tungsten oxide gas sensing surface oxygen vacancies thermal annealing |
| title | WO<sub>3</sub>-Based Thin Films Grown by Pulsed Laser Deposition as Gas Sensors for NO<sub>2</sub> Detection |
| title_full | WO<sub>3</sub>-Based Thin Films Grown by Pulsed Laser Deposition as Gas Sensors for NO<sub>2</sub> Detection |
| title_fullStr | WO<sub>3</sub>-Based Thin Films Grown by Pulsed Laser Deposition as Gas Sensors for NO<sub>2</sub> Detection |
| title_full_unstemmed | WO<sub>3</sub>-Based Thin Films Grown by Pulsed Laser Deposition as Gas Sensors for NO<sub>2</sub> Detection |
| title_short | WO<sub>3</sub>-Based Thin Films Grown by Pulsed Laser Deposition as Gas Sensors for NO<sub>2</sub> Detection |
| title_sort | wo sub 3 sub based thin films grown by pulsed laser deposition as gas sensors for no sub 2 sub detection |
| topic | pulsed laser deposition thin films tungsten oxide gas sensing surface oxygen vacancies thermal annealing |
| url | https://www.mdpi.com/1424-8220/24/22/7366 |
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