Analysis of Wave Propagation and Energy Deposition in Low-field Peaks under Three-dimensional Non-uniform Magnetic Field

The helicon plasma exhibits the advantages of a high rate of ionization, high density and low confinement magnetic field. It has been widely used in plasma thruster, semiconductor etching, etc. The density of helicon plasmas would be monotonically dependent on the external magnetic field when the ma...

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Main Author: DU Dan1, HU Shaoxiong2, YIN Chenyan3, , HUANG Ziwen3, YU Cui2, YANG Wenjun2, ZHOU Hua4, GONG Xueyu3
Format: Article
Language:English
Published: Editorial Board of Atomic Energy Science and Technology 2024-12-01
Series:Yuanzineng kexue jishu
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Online Access:https://yznkxjs.xml-journal.net/article/doi/10.7538/yzk.2024.youxian.0026
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author DU Dan1, HU Shaoxiong2, YIN Chenyan3, , HUANG Ziwen3, YU Cui2, YANG Wenjun2, ZHOU Hua4, GONG Xueyu3
author_facet DU Dan1, HU Shaoxiong2, YIN Chenyan3, , HUANG Ziwen3, YU Cui2, YANG Wenjun2, ZHOU Hua4, GONG Xueyu3
author_sort DU Dan1, HU Shaoxiong2, YIN Chenyan3, , HUANG Ziwen3, YU Cui2, YANG Wenjun2, ZHOU Hua4, GONG Xueyu3
collection DOAJ
description The helicon plasma exhibits the advantages of a high rate of ionization, high density and low confinement magnetic field. It has been widely used in plasma thruster, semiconductor etching, etc. The density of helicon plasmas would be monotonically dependent on the external magnetic field when the magnetic field intensity is sufficiently strong. However, it does not hold at low magnetic fields, which are characterized by a density peak (or low-field peaks). In this paper, a three-dimensional numerical model of argon helicon plasma discharge was established based on the detailed consideration of particle collision and chemical reaction. The characteristics of low-field peaks under different three-dimensional non-uniform magnetic field distributions were simulated and analyzed. The main simulation results show that there are density peaks with the increase of the maximum magnetic field intensity within a certain magnetic field range. Below a threshold (Bmax<120 G), the power deposition caused by Doppler-shifted cyclotron damping and anomalous Doppler damping is dominant when the low field peak occurs, and the power deposition peak is distributed near the standing helicon wave. Above the threshold (Bmax≥120 G), the power deposition caused by collision damping is dominant. The distribution of power deposition caused by Landau damping and collision damping is close, mainly at the plasma edge and end plate. The left-hand polarization electric field component and right-hand polarization electric field component of the helicon wave propagate in the plasma simultaneously. By changing the magnetic field distribution, the amplitude of the polarization electric field component of helicon wave, propagation properties (traveling wave, standing wave, and partially travelling-partially standing wave), power deposition, density and temperature distribution can be controlled when the low field peak is generated. The standing wave and power deposition generated by helicon wave are mainly distributed in the region with high magnetic field. The relevant research results may provide certain theoretical guidance for revealing low-field peak mechanism of helicon wave plasma.
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institution Kabale University
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language English
publishDate 2024-12-01
publisher Editorial Board of Atomic Energy Science and Technology
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series Yuanzineng kexue jishu
spelling doaj-art-2b0c6a6bb9ae4d0791afcd90663e0dd62024-12-19T08:51:40ZengEditorial Board of Atomic Energy Science and TechnologyYuanzineng kexue jishu1000-69312024-12-01581224622477DOI:10.7538/yzk.2024.youxian.0026Analysis of Wave Propagation and Energy Deposition in Low-field Peaks under Three-dimensional Non-uniform Magnetic FieldDU Dan1, HU Shaoxiong2, YIN Chenyan3, , HUANG Ziwen3, YU Cui2, YANG Wenjun2, ZHOU Hua4, GONG Xueyu301. School of Mathematics and Physics, University of South China, Hengyang 421001, China 2. School of Electrical Engineering, University of South China, Hengyang 421001, China 3. School of Nuclear Science and Technology, University of South China, Hengyang 421001, China 4. Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, ChinaThe helicon plasma exhibits the advantages of a high rate of ionization, high density and low confinement magnetic field. It has been widely used in plasma thruster, semiconductor etching, etc. The density of helicon plasmas would be monotonically dependent on the external magnetic field when the magnetic field intensity is sufficiently strong. However, it does not hold at low magnetic fields, which are characterized by a density peak (or low-field peaks). In this paper, a three-dimensional numerical model of argon helicon plasma discharge was established based on the detailed consideration of particle collision and chemical reaction. The characteristics of low-field peaks under different three-dimensional non-uniform magnetic field distributions were simulated and analyzed. The main simulation results show that there are density peaks with the increase of the maximum magnetic field intensity within a certain magnetic field range. Below a threshold (Bmax<120 G), the power deposition caused by Doppler-shifted cyclotron damping and anomalous Doppler damping is dominant when the low field peak occurs, and the power deposition peak is distributed near the standing helicon wave. Above the threshold (Bmax≥120 G), the power deposition caused by collision damping is dominant. The distribution of power deposition caused by Landau damping and collision damping is close, mainly at the plasma edge and end plate. The left-hand polarization electric field component and right-hand polarization electric field component of the helicon wave propagate in the plasma simultaneously. By changing the magnetic field distribution, the amplitude of the polarization electric field component of helicon wave, propagation properties (traveling wave, standing wave, and partially travelling-partially standing wave), power deposition, density and temperature distribution can be controlled when the low field peak is generated. The standing wave and power deposition generated by helicon wave are mainly distributed in the region with high magnetic field. The relevant research results may provide certain theoretical guidance for revealing low-field peak mechanism of helicon wave plasma.https://yznkxjs.xml-journal.net/article/doi/10.7538/yzk.2024.youxian.0026helicon plasmalow-field peakstanding wavepower deposition
spellingShingle DU Dan1, HU Shaoxiong2, YIN Chenyan3, , HUANG Ziwen3, YU Cui2, YANG Wenjun2, ZHOU Hua4, GONG Xueyu3
Analysis of Wave Propagation and Energy Deposition in Low-field Peaks under Three-dimensional Non-uniform Magnetic Field
Yuanzineng kexue jishu
helicon plasma
low-field peak
standing wave
power deposition
title Analysis of Wave Propagation and Energy Deposition in Low-field Peaks under Three-dimensional Non-uniform Magnetic Field
title_full Analysis of Wave Propagation and Energy Deposition in Low-field Peaks under Three-dimensional Non-uniform Magnetic Field
title_fullStr Analysis of Wave Propagation and Energy Deposition in Low-field Peaks under Three-dimensional Non-uniform Magnetic Field
title_full_unstemmed Analysis of Wave Propagation and Energy Deposition in Low-field Peaks under Three-dimensional Non-uniform Magnetic Field
title_short Analysis of Wave Propagation and Energy Deposition in Low-field Peaks under Three-dimensional Non-uniform Magnetic Field
title_sort analysis of wave propagation and energy deposition in low field peaks under three dimensional non uniform magnetic field
topic helicon plasma
low-field peak
standing wave
power deposition
url https://yznkxjs.xml-journal.net/article/doi/10.7538/yzk.2024.youxian.0026
work_keys_str_mv AT dudan1hushaoxiong2yinchenyan3huangziwen3yucui2yangwenjun2zhouhua4gongxueyu3 analysisofwavepropagationandenergydepositioninlowfieldpeaksunderthreedimensionalnonuniformmagneticfield