Effects of N/Ti Atomic Ratio on Microstructure and Properties of TiN Films
TiN hard films are the basis of many existing multi - component nitride hard films. The N/Ti atomic ratio has important influences on TiN hard films. Based on the preparation process methods of TiN hard films, the influencing factors and control ways of the change of N content in the films were disc...
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| Main Author: | |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Department of Materials Protection
2021-04-01
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| Series: | Cailiao Baohu |
| Subjects: | |
| Online Access: | http://www.mat-pro.com/fileup/1001-1560/PDF/20210424.pdf |
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