Direct writing of graphitic carbon/polydimethylsiloxane bimorph thermal microactuator via two-photon polymerization and laser-induced graphitization

Direct writing of graphitic carbon/polydimethylsiloxane bimorph thermal microactuator via two-photon polymerization and laser-induced graphitization

This paper presents a laser direct writing method for the fabrication of a laser-induced graphitic carbon (LIGC)/polydimethylsiloxane (PDMS) bimorph thermal microactuator via two-photon polymerization (TPP) and laser-induced graphitization (LIG). The fundamental parameters of femtosecond laser dotti...

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Bibliographic Details
Main Authors: Yu YAMASHITA, Yasuko TANAKA, Tianzhou CHEN, Yoshihiro TAGUCHI, Masaaki HASHIMOTO
Format: Article
Language:English
Published: The Japan Society of Mechanical Engineers 2024-10-01
Series:Mechanical Engineering Journal
Subjects:
bimorph
laser direct writing
laser-induced graphitization
polydimethylsiloxane
thermal microactuator
two-photon polymerization
Online Access:https://www.jstage.jst.go.jp/article/mej/11/6/11_24-00035/_pdf/-char/en
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https://www.jstage.jst.go.jp/article/mej/11/6/11_24-00035/_pdf/-char/en

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