Magnetron Sputter Deposition of Amorphous Silicon–SiO2 Quantized Nanolaminates

Magnetron Sputter Deposition of Amorphous Silicon–SiO2 Quantized Nanolaminates

Quantization effects in nanolaminate structures of oxide materials are proposed and experimentally demonstrated only recently. Herein, the material combination of amorphous silicon and SiO2 deposited by magnetron sputtering is investigated and it is shown that the quantization effect can be observed...

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Bibliographic Details
Main Authors: Silvia Schwyn Thöny, Manuel Bärtschi, Marietta Batzer, Manuel Baselgia, Raphael Gmünder, Amit Sharma, Tijmen Vermeij, Xavier Maeder, Stephan Waldner
Format: Article
Language:English
Published: Wiley-VCH 2024-12-01
Series:Advanced Photonics Research
Subjects:
bandgap
low‐loss coating
magnetron sputtering
meta materials
optical thin films
quantized nanolaminates
Online Access:https://doi.org/10.1002/adpr.202400057
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https://doi.org/10.1002/adpr.202400057

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