Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etching
β-Ga2O3 air bridges on (100) substrates were fabricated through a self-aligning process that used conventional anisotropic BCl3/Ar-plasma etching and crystallographic plasma-free HCl gas etching. The former etching can be done as vertic...
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-05-01
|
| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0260753 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|