APA (7th ed.) Citation

Oshima, T., & Oshima, Y. Fabrication of air bridges on (100) β-Ga2O3 using crystallographic HCl gas etching. AIP Publishing LLC.

Chicago Style (17th ed.) Citation

Oshima, Takayoshi, and Yuichi Oshima. Fabrication of Air Bridges on (100) β-Ga2O3 Using Crystallographic HCl Gas Etching. AIP Publishing LLC.

MLA (9th ed.) Citation

Oshima, Takayoshi, and Yuichi Oshima. Fabrication of Air Bridges on (100) β-Ga2O3 Using Crystallographic HCl Gas Etching. AIP Publishing LLC.

Warning: These citations may not always be 100% accurate.