Thermal Behavior of Biaxial Piezoelectric MEMS Scanner

Thermal Behavior of Biaxial Piezoelectric MEMS Scanner

This paper presents the thermal behavior of a non-resonant (quasi-static) biaxial piezoelectric MEMS scanner [...]

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Bibliographic Details
Main Authors:	Laurent Mollard, Christel Dieppedale, Antoine Hamelin, François Gardien, Gwenael Le Rhun, Jean Hue, Laurent Frey, Gael Castellan
Format:	Article
Language:	English
Published:	MDPI AG 2024-06-01
Series:	Proceedings
Subjects:	thermal behavior 2D MEMS mirror piezoelectric Bragg reflector high optical power management
Online Access:	https://www.mdpi.com/2504-3900/97/1/223
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