Thermal Behavior of Biaxial Piezoelectric MEMS Scanner
This paper presents the thermal behavior of a non-resonant (quasi-static) biaxial piezoelectric MEMS scanner [...]
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-06-01
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| Series: | Proceedings |
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| Online Access: | https://www.mdpi.com/2504-3900/97/1/223 |
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| _version_ | 1846102979287973888 |
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| author | Laurent Mollard Christel Dieppedale Antoine Hamelin François Gardien Gwenael Le Rhun Jean Hue Laurent Frey Gael Castellan |
| author_facet | Laurent Mollard Christel Dieppedale Antoine Hamelin François Gardien Gwenael Le Rhun Jean Hue Laurent Frey Gael Castellan |
| author_sort | Laurent Mollard |
| collection | DOAJ |
| description | This paper presents the thermal behavior of a non-resonant (quasi-static) biaxial piezoelectric MEMS scanner [...] |
| format | Article |
| id | doaj-art-1acdf0c2059640bba4ba4188ae29e975 |
| institution | Kabale University |
| issn | 2504-3900 |
| language | English |
| publishDate | 2024-06-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Proceedings |
| spelling | doaj-art-1acdf0c2059640bba4ba4188ae29e9752024-12-27T14:49:13ZengMDPI AGProceedings2504-39002024-06-0197122310.3390/proceedings2024097223Thermal Behavior of Biaxial Piezoelectric MEMS ScannerLaurent Mollard0Christel Dieppedale1Antoine Hamelin2François Gardien3Gwenael Le Rhun4Jean Hue5Laurent Frey6Gael Castellan7University Grenoble Alpes, CEA, Leti, F-38000 Grenoble, FranceUniversity Grenoble Alpes, CEA, Leti, F-38000 Grenoble, FranceUniversity Grenoble Alpes, CEA, Leti, F-38000 Grenoble, FranceUniversity Grenoble Alpes, CEA, Leti, F-38000 Grenoble, FranceUniversity Grenoble Alpes, CEA, Leti, F-38000 Grenoble, FranceUniversity Grenoble Alpes, CEA, Leti, F-38000 Grenoble, FranceUniversity Grenoble Alpes, CEA, Leti, F-38000 Grenoble, FranceUniversity Grenoble Alpes, CEA, Leti, F-38000 Grenoble, FranceThis paper presents the thermal behavior of a non-resonant (quasi-static) biaxial piezoelectric MEMS scanner [...]https://www.mdpi.com/2504-3900/97/1/223thermal behavior2D MEMS mirrorpiezoelectricBragg reflectorhigh optical power management |
| spellingShingle | Laurent Mollard Christel Dieppedale Antoine Hamelin François Gardien Gwenael Le Rhun Jean Hue Laurent Frey Gael Castellan Thermal Behavior of Biaxial Piezoelectric MEMS Scanner Proceedings thermal behavior 2D MEMS mirror piezoelectric Bragg reflector high optical power management |
| title | Thermal Behavior of Biaxial Piezoelectric MEMS Scanner |
| title_full | Thermal Behavior of Biaxial Piezoelectric MEMS Scanner |
| title_fullStr | Thermal Behavior of Biaxial Piezoelectric MEMS Scanner |
| title_full_unstemmed | Thermal Behavior of Biaxial Piezoelectric MEMS Scanner |
| title_short | Thermal Behavior of Biaxial Piezoelectric MEMS Scanner |
| title_sort | thermal behavior of biaxial piezoelectric mems scanner |
| topic | thermal behavior 2D MEMS mirror piezoelectric Bragg reflector high optical power management |
| url | https://www.mdpi.com/2504-3900/97/1/223 |
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