Methane Sensitivity of Pulsed Laser Treated SnO<sub>2</sub>(Ag) Nanocomposite Layers
This paper reports on the gas sensitivity of SnO2(Ag) layers, consequently formed by magnetron sputtering of Sn + Ag target, oxidation of Sn0.65Ag0.35 layers at the temperature of 650 °С within 30 min and modified by laser radiation pulses at energy density of W = 1.5–3.2 J/cm2. Using transmission e...
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| Main Authors: | , |
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| Format: | Article |
| Language: | Russian |
| Published: |
Educational institution «Belarusian State University of Informatics and Radioelectronics»
2023-04-01
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| Series: | Doklady Belorusskogo gosudarstvennogo universiteta informatiki i radioèlektroniki |
| Subjects: | |
| Online Access: | https://doklady.bsuir.by/jour/article/view/3594 |
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